Title:
VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2020/217407
Kind Code:
A1
Abstract:
A rotary mechanism (20) of this vacuum pump (100) includes: a magnetic bearing unit (21) that has a first outer diameter (91) and can operate as a first radial magnetic bearing (40); and a motor unit (22) that is provided at a position closer to a second end (11b) side of a rotary shaft (11) than the magnetic bearing unit, that has a second outer diameter (92) greater than the first outer diameter, and that can operate both as a motor (30) and a second radial magnetic bearing (50).
Inventors:
MORI TAKAHIRO (JP)
INOUE TSUNEHIRO (JP)
OTA TOMOO (JP)
INOUE TSUNEHIRO (JP)
OTA TOMOO (JP)
Application Number:
PCT/JP2019/017724
Publication Date:
October 29, 2020
Filing Date:
April 25, 2019
Export Citation:
Assignee:
SHIMADZU CORP (JP)
International Classes:
F04D19/04
Foreign References:
| JPS5879695A | 1983-05-13 | |||
| JPH1193887A | 1999-04-06 | |||
| JPH04339195A | 1992-11-26 | |||
| JPH04209996A | 1992-07-31 | |||
| JP2017020520A | 2017-01-26 | |||
| JPH1162878A | 1999-03-05 |
Attorney, Agent or Firm:
MIYAZONO, Hirokazu (JP)
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