Title:
VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2021/065584
Kind Code:
A1
Abstract:
[Problem] To obtain a vacuum pump that suppresses generation of deposits resulting from exhaust gas. [Solution] This vacuum pump is provided with: a pump part 10b provided with a shaft section 13, a rotor 11 disposed on the outer circumference of the shaft section 13, and a stator 21 disposed on the outer circumference of the rotor 11; an exhaust gas flow passage extending from the pump part 10b to an exhaust port 9; and a shielding part 24 that inhibits exhaust gas in the flow passage from coming into contact with the shaft section 13. In addition, the shielding part 24 has, at an end thereof, a surface that faces the rotor 11.
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Inventors:
MIWATA TOORU (JP)
TAKAI YOSHIYUKI (JP)
TAKAI YOSHIYUKI (JP)
Application Number:
PCT/JP2020/035600
Publication Date:
April 08, 2021
Filing Date:
September 18, 2020
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Domestic Patent References:
| WO2018164013A1 | 2018-09-13 | |||
| WO2014050648A1 | 2014-04-03 |
Foreign References:
| JP2015143513A | 2015-08-06 | |||
| JPH10306789A | 1998-11-17 | |||
| JPH11336691A | 1999-12-07 | |||
| JP2014062480A | 2014-04-10 | |||
| JPH09310696A | 1997-12-02 | |||
| JP2000131476A | 2000-05-12 | |||
| JPS5968196U | 1984-05-09 | |||
| JP2017002856A | 2017-01-05 |
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