Title:
VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2022/124240
Kind Code:
A1
Abstract:
Provided is a vacuum pump in which a deterioration in performance due to thermal expansion can be effectively suppressed. This vacuum pump is provided with an exterior body (203) provided with an intake port (101), a rotating body (103) which is enclosed in the exterior body (203) and which is supported rotatably, a substantially cylindrical screw groove stator (131) disposed at the outer circumference of the rotating body (103), and a screw groove (131a) engraved on at least one of the outer circumferential surface of the rotating body (103) and the inner circumferential surface of the screw groove stator (131), wherein the rotating body (103) is rotated in order to exhaust gas taken in from the intake port (101) side to the outside of the exterior body (203), and wherein a restricting means (220), formed from a material having a lower linear expansion coefficient than the material of the screw groove stator (131), for reducing deformation in the radial direction during thermal expansion of the screw groove stator (131), is arranged on the outer circumference of the screw groove stator (131).
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Inventors:
NAKATSUJI SHIGEYOSHI (JP)
SAKAGUCHI YOSHIYUKI (JP)
SAKAGUCHI YOSHIYUKI (JP)
Application Number:
PCT/JP2021/044569
Publication Date:
June 16, 2022
Filing Date:
December 03, 2021
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Domestic Patent References:
| WO2017086135A1 | 2017-05-26 | |||
| WO2015122215A1 | 2015-08-20 |
Foreign References:
| JPS63154891A | 1988-06-28 | |||
| JPS58193932A | 1983-11-11 |
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