Title:
VACUUM PUMP, VACUUM PUMP FIXED COMPONENTS, AND VACUUM PUMP SUPPORT COMPONENT
Document Type and Number:
WIPO Patent Application WO/2022/124239
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump in which the number of components can be reduced and the structure can be simplified. [Solution] A vacuum pump characterized by comprising: a casing (127); a rotating body (103) accommodated in the casing; fixed components (131, 220) that constitute gas flow paths (131a, 250) for discharging, to outside of the casing, gas that has been sucked inside the casing due to the rotation of the rotating body; a heating means (210) for heating the fixed components; and a support component (129) for supporting the fixed components, wherein at least one of either the fixed components or the support component is provided with a projecting part (221), and the support component supports the fixed components by means of the projecting part from at least one direction of either the radial direction or the axial direction.
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Inventors:
SUZUKI HARUKI (JP)
Application Number:
PCT/JP2021/044568
Publication Date:
June 16, 2022
Filing Date:
December 03, 2021
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Domestic Patent References:
| WO2015015902A1 | 2015-02-05 | |||
| WO2017086135A1 | 2017-05-26 |
Foreign References:
| JP2006152958A | 2006-06-15 | |||
| JP2006037951A | 2006-02-09 | |||
| JP2019090384A | 2019-06-13 |
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