Title:
VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2022/186075
Kind Code:
A1
Abstract:
[Problem] To obtain a vacuum pump having a favorable allowable flow rate, while suppressing accumulation of deposits. [Solution] This vacuum pump is provided with: a rotor; a plurality of stator parts having a gas compression function and disposed opposite to the rotor; and a reference member 301 that is one of members laminated from a base part 129 toward an inlet port 101 and that serves as a reference of axial positions of the plurality of stator parts. Further, the plurality of stator parts are disposed on the downstream side (exhaust port 133 side) of the reference member 301.
Inventors:
SUZUKI HARUKI (JP)
Application Number:
PCT/JP2022/007938
Publication Date:
September 09, 2022
Filing Date:
February 25, 2022
Export Citation:
Assignee:
C (JP)
International Classes:
F04D19/04
Domestic Patent References:
| WO2014045438A1 | 2014-03-27 | |||
| WO2013110936A2 | 2013-08-01 |
Foreign References:
| JPH11201083A | 1999-07-27 | |||
| JP2001082379A | 2001-03-27 | |||
| JPH1162879A | 1999-03-05 | |||
| JP2003148380A | 2003-05-21 | |||
| JP2014051952A | 2014-03-20 |
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