Title:
VACUUM PUMP
Document Type and Number:
WIPO Patent Application WO/2022/196560
Kind Code:
A1
Abstract:
[Problem] To provide a vacuum pump in which, even if a rotary blade is damaged, fragments of the rotary blade are not susceptible to scattering from an exhaust port. [Solution] This vacuum pump (100) comprises: a rotary blade (103) which rotates around a vertical axis (CL); and a casing (127) which stores the rotary blade, the rotation of the rotary blade causing intake gas to be exhausted in the radial direction of the rotary blade, the vacuum pump being characterized in that a gas exhaust port (133) is provided at a position offset in the direction of the vertical axis from the position of a gas outlet (130) of the rotary blade.
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Inventors:
YAMAGUCHI TOSHIKI (JP)
Application Number:
PCT/JP2022/010898
Publication Date:
September 22, 2022
Filing Date:
March 11, 2022
Export Citation:
Assignee:
EDWARDS JAPAN LTD (JP)
International Classes:
F04D19/04
Foreign References:
| JPH0674187A | 1994-03-15 | |||
| JPH08511071A | 1996-11-19 | |||
| US6302641B1 | 2001-10-16 | |||
| JP2005042709A | 2005-02-17 | |||
| JP2005307859A | 2005-11-04 |
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