FIELD OF THE INVENTION

The present invention relates to vacuum pumping and/or abatement systems.

BACKGROUND

Vacuum pumping and abatement systems are used in varied and different technological fields, for example in semiconductor fabrication. Typically, in said systems, vacuum pumping equipment is used to pump gas (e.g. gas from an industrial process) out of a particular location, and abatement equipment is used to abate (e.g. destroy or dispose of) undesirable substances (e.g. exhaust gas) which have been produced.

Depending on the processes involved, there may be different criteria for vacuum pumping and abatement. For example, it is typically desirable to use different vacuum pumping equipment for different processes involving different process gases, different gas pressures, and different gas flow. Also, it is typically desirable to use different abatement equipment to destroy or dispose of different undesirable substances, or deal with different gas flows.

Vacuum pumping and abatement systems are typically designed bespoke according to the particular processes with which they will be used. However, the amount of time spent designing, manufacturing and installing such a bespoke system is typically prolonged because different processes require different vacuum pumping and abatement system solutions.

SUMMARY OF INVENTION

In a first aspect, there is provided a vacuum pumping and/or abatement system dock, the dock comprising: a first support member for coupling to a surface, and a second support member for receiving a vacuum pumping and/or abatement system module, wherein the second support member is coupled to the first support member by one or more first coupling members, wherein the one or more first coupling members separate the first and second support members by a separation distance, and wherein the one or more first coupling members are adjustable to alter the separation distance between the first support member and the second support member.

The dock may further comprise one or more hooks for hooking onto a vacuum pumping and/or abatement module received by the second support member.

The one or more hooks may be attached to a top surface of the second support member.

Each of the first and second support members may be an elongate member.

Each of the first and second support members may have a rectangular transverse cross-section. The dock may be U-shaped.

The dock may be line-shaped.

The dock may be a shape selected from the group of shapes consisting of: U-shaped, line-shaped, L-shaped, l-shaped, X-shaped, T-shaped, C-shaped, cruciform shaped, H-shaped. In a second aspect, there is provided a vacuum pumping and/or

abatement system, comprising the dock according to the first aspect coupled to a surface, and a vacuum pumping and/or abatement system module mounted to the dock.

The module may comprise one or more protrusions onto which the one or more hooks are hooked, thereby to prevent or oppose movement of the module relative to the dock in one or more directions.

The one or more protrusions may be one or more cuboid blocks. The module may comprise one or more third support members configured to couple the module to the surface and to support at least part of the weight of the module above the surface.

The module may comprise a mounting member engaged with the dock to mount the module to the dock.

The module may comprise one or more adjustable feet engaged with the surface.

The system may comprise a plurality of docks and a plurality of vacuum pumping and/or abatement system modules, wherein the plurality of modules are attached together to permit fluid flow between the modules, wherein each dock is in accordance with the first aspect, wherein each module is mounted to a respective dock, and wherein the separation distances of the docks are such that a top surface of the second support member of each dock is flush with a top surface of the second support member of each of the other docks. In a third aspect, there is provided a method of mounting a module of a vacuum pumping and/or abatement system to a dock of the vacuum pumping and/or abatement system, the method comprising: coupling a first support member of the dock to a second support member of the dock using one or more first coupling members, wherein the one or more first coupling members separate the first and second support members by a separation distance, and wherein the one or more first coupling members are adjustable to alter the separation distance between the first support member and the second support member, adjusting the one or more first coupling members to alter the separation distance between the first and second support members, and mounting the module to the second support member of the dock.

The separation distance may be altered to be a pre-determined separation distance.

The pre-determined separation distance may be such that a top surface of the second support member of the dock is flush with a top surface of a second support member of another dock of the system. BRIEF DESCRIPTION OF DRAWINGS

Figure 1 is a schematic illustration (not to scale) showing a vacuum pumping and/or abatement system; Figure 2 is a schematic illustration (not to scale) showing a perspective view of the vacuum pumping and/or abatement system;

Figure 3 is a schematic illustration (not to scale) showing perspective views of a module and dock of the system according to a first embodiment;

Figure 4 is a schematic illustration (not to scale) showing a close-up perspective view of the dock according to the first embodiment;

Figure 5 is a schematic illustration (not to scale) showing a close-up perspective view of the module mounted to the dock according to the first embodiment;

Figure 6 is a schematic illustration (not to scale) showing a perspective view of a bottom side of the dock according to the first embodiment;

Figure 7 is a flowchart showing various steps of a method of mounting the module to the dock according to the first embodiment;

Figure 8 is a schematic illustration (not to scale) showing a perspective view of a dock according to a second embodiment; Figure 9 is a schematic illustration (not to scale) showing a close-up perspective view of the dock and a module according to the second embodiment;

Figure 10 is a schematic illustration (not to scale) showing a close-up perspective view of the module mounted to the dock according to the second embodiment; and Figure 1 1 is a flowchart showing various steps of a method of mounting the module to the dock according to the second embodiment.

DETAILED DESCRIPTION In the following description, it will be appreciated that relative terms such as horizontal and vertical, top and bottom, above and below, front and rear, and so on, are used below merely for ease of reference to the Figures, and these terms are not limiting as such, and any two differing directions or positions and so on may be implemented rather than truly horizontal and vertical, top and bottom, and so on.

Figure 1 is a schematic illustration (not to scale) showing a modular vacuum pumping and/or abatement system 2.

The system 2 is fluidly connected to an entity 4 via a fluid input line 6, commonly referred to as a "foreline", between the system 2 and the entity 4. The entity 4 may, for example, be a chamber or room used in an industrial process such as semiconductor fabrication. The system 2 is also fluidly connected to an exhaust line 8.

In operation, the system 2 pumps gas out of the entity 4 via the fluid input lines 6 and/or abates (e.g. destroys or disposes of) undesirable substances produced by the entity 4 which may be present in the pumped gas. The system 2 also pumps exhaust gas (which may be gas which has undergone an abatement process) out of the system 2 via the exhaust line 8, thereby to remove the exhaust gas from the system 2. The system 2 is connected to a facilities supply 14 via a plurality of facilities input lines 16. The facilities supply 14 is configured to supply facilities to the system 2 via the plurality of facilities input lines 16. The term "facilities" is used herein to refer to resources which are used by the system 2 to support the main pumping/abatement function of the system 2. These facilities allow the system 2 to operate properly during use. Examples of facilities include: facilities fluids (e.g. liquid coolant, city water, de-ionised water, clean dry air, methane, oxygen, nitrogen, hydrogen), electrical power and/or electrical signals carried by electrical connections, and optical signals carried by optical connections (e.g. optical fibres). The system 2 comprises a plurality of modules 10, which may also be referred to as "units" or "slices". Each module 10 comprises one or more apparatuses 12. Each apparatus 12 is configured to perform a respective function within the system 2. For example, an apparatus 12 may be a vacuum pumping apparatus for pumping gas out of the entity 4, an abatement apparatus for abating undesirable substances produced by the entity 4, an inverter for converting DC electrical power into AC electrical power, or an electronic controller for controlling operation of all or part of the system 2. However, the one or more apparatuses 12 are not limited as such. In general, each apparatus 12 may be any apparatus which is used in a vacuum pumping and/or abatement system. Two or more of the apparatuses 12 may be substantially identical and/or perform substantially the same function as each other.

The vacuum pumping and/or abatement system 2 may be an integrated system. The term "integrated system" may be used to refer to two or more modules 10 integrated together into a common system, the modules 10 being selected from the group of modules consisting of: a module 10 comprising a vacuum pumping apparatus, a module 10 comprising an abatement apparatus, and a module 10 comprising a controller for controlling the vacuum pumping and/or abatement apparatuses. Figure 2 is a schematic illustration (not to scale) showing a perspective view of the modular vacuum pumping and/or abatement system 2.

The plurality of modules 10 of the system 2 are positioned in a side-by- side, contiguous arrangement and coupled together such that each module 10 is attached to one or more adjacent modules 10. The system 2 comprises facilities lines 20 and vacuum pumping and/or abatement lines 21 . The facilities lines 20 may include pipes (e.g. metal pipes) configured to permit the flow of facilities fluid therethrough, and/or electrical or optical connections such as wires or optical fibres. The vacuum pumping and/or abatement lines 21 may include pipes (e.g. metal pipes) configured to permit the flow of pumped gas therethrough. In order to position the modules 10, the system 2 also comprises a plurality of docks (not shown in Figure 2) to which the modules 10 are mounted. More specifically, each module 10 is mounted to a respective one of the docks in order to position that module 10. The docks and the way in which they are used in conjunction with the modules 10 will be described in more detail below with reference to Figures 3-1 1 .

Figure 3 is a schematic illustration (not to scale) showing a perspective view of a module 10 and dock 40 of the system 2 according to a first embodiment. The module 10 comprises an apparatus 12, one or more facilities lines 20, one or more vacuum pumping and/or abatement lines 21 , a frame 22, one or more feet 32, and a mounting member 34.

The module 10 has a front side 26, a rear side 27, a top side 28, a bottom side 29, and two opposing lateral sides 30. The apparatus 12 is disposed at least partially (or wholly) within the frame

22. In other words, the frame 22 defines a space and the apparatus 12 is at least partially (or wholly) disposed within the space. The apparatus 12 may be a vacuum pumping and/or abatement apparatus.

The frame 22 comprises a platform 24 and a plurality of interconnected bars 25 coupled to the platform 24. More specifically, the plurality of interconnected bars 25 are mounted to and supported by the platform 24. The platform 24 is disposed at or proximate to the bottom side 29 of the module 10.

The facilities lines 20 may include one or more lines which are configured to receive facilities fluid from outside the module 10, direct the facilities fluid through the module 10, and discharge the facilities fluid out of the module 10 (e.g. to another module or out of the system 2 entirely). The facilities lines 20 may include one or more lines which are configured to convey electrical power, electrical signals, or optical signals through the module 10. The vacuum pumping and/or abatement lines 21 are configured to receive gas pumped from the entity 4, direct the pumped gas through the module 10, and discharge the pumped gas out of the module 10 (e.g. to another module 10 or out of the system 2 entirely). The one or more feet 32 are configured to at least partially support the module 10 when the module 10 is resting on them. The one or more feet 32 are disposed at or proximate to the bottom side 29 of the module 10. More specifically, the one or more feet are attached to a bottom surface of the platform 24. The one or more feet 32 will be described in more detail below with reference to Figure 6.

The mounting member 34 of the module 10 is for mounting the module 10 to the dock 40. More specifically, the mounting member 34 is configured to engage with the dock 40 such that the module 10 is at least partially supported by the dock 40. In other words, the module 10 is configured to at least partially rest on the dock 40 when the module 10 is mounted to the dock 40 using the mounting member 34. The mounting member 34 is coupled to the frame 22 of the module 10. More specifically, the mounting member 34 is coupled between the platform 24 and one or more of the interconnected bars 25. The mounting member 34 is located at or proximate to the bottom and rear side 27, 29 of the module 10. In this embodiment, the mounting member 34 is an elongate member with an L-shaped transverse cross-section. The mounting member 34 will be described in more detail below with reference to Figure 5.

The dock 40 is configured to receive the module 10 to allow the module 10 to be mounted to the dock 40. More specifically, in this embodiment, the dock 40 comprises a single mount 40a which is configured to receive the mounting member 34 of the module 10 to allow the module 10 to be mounted to the dock 40. The single mount 40a is elongate. Thus, in this embodiment, the dock 40 is line-shaped.

The mount 40a comprises a first support member 42, a second support member 44, one or more first coupling members 46, and one or more second coupling members 48. The first support member 42 is coupled to the second support member 44 by the one or more first coupling members 46. The first support member 42 is couplable to a rest surface (e.g. a floor) by the one or more second coupling members 48. The second support member 44 is couplable to the mounting member 34 by one or more third coupling members (not shown in Figure 3). In this embodiment, the first and second support members 42, 44 are both elongate members with rectangular transverse cross-sections (e.g. elongate plates).

The one or more first coupling members 46 are adjustable to alter a separation distance between the first support member 42 and the second support member 44. This will be described in more detail below with reference to Figure 4.

Figure 4 is a schematic illustration (not to scale) showing a close-up perspective view of the dock 40 according to the first embodiment.

The first support member 42 comprises a top surface 42a, a bottom surface 42b opposite the top surface 42a, a front surface 42c, and a rear surface 42d opposite the front surface 42c. Similarly, the second support member 44 comprises a top surface 44a, a bottom surface 44b opposite the top surface 44a, a front surface 44c, and a rear surface 44d opposite the front surface 44c.

The one or more first coupling members 46 couple the first support member 42 to the second support member 44 such that the first and second support members 42, 44 are secured to each other while also being separated from each other by a separation distance. More specifically, the coupling is such that the bottom surface 44b of the second support member 44 is separated from the top surface 42a of the first support member 42 by the separation distance. The one or more first coupling members 46 are adjustable to alter the separation distance between the first and second support members 42, 44. This allows the first and second support members 42, 44 to be coupled to each other with each of a plurality of different separation distances. The separation distance may, for example, be in the range 0mm-23rnm, e.g. 0mm, 1 mm, 2mm, 3mm, 4mm, 5mm, 6mm, 7mm, 8mm, 9mm, 10mm, 1 1 mm, 12mm, 13mm, 14mm, 15mm, 16mm, 17mm, 18mm, 19mm, 20mm, 21 mm, 22mm, 23mm. In this embodiment, the one or more first coupling members 46 are one or more adjustable bolts or screws (e.g. ball nosed grub screws).

The one or more second coupling members 48 are configured to couple the first support member 42 to a rest surface (e.g. a floor) on which the dock 40 rests. More specifically, the bottom surface 42b of the first support member 42 is configured to be placed into contact with the rest surface and the one or more second coupling members 48 are configured to secure the first support member 42 to the rest surface. In this embodiment, the one or more second coupling members 48 are one or more "seismic bolts", i.e. bolts capable of withstanding forces generated by earthquakes. For example, a seismic bolt may a high-grade steel bolt that fits into an expansion anchor inserted in the ground.

Figure 5 is a schematic illustration (not to scale) showing a close-up perspective view of the module 10 mounted to the dock 40 according to the first embodiment.

The mounting member 34 of the module 10 comprises a top surface 34a, a bottom surface 34b opposite the top surface 34a, a front surface 34c, and a rear surface 34d opposite the front surface 34c.

When the module 10 is mounted to the dock, the mounting member 34 is engaged with the dock 40 such that the bottom surface 34b of the mounting member 34 is in contact with the top surface 44a of the second support member 44 and the rear surface 34d of the mounting member 34 is in contact with the front surface 44c of the second support member 44. In this way, the module 10 at least partially rests on the top surface 44a of the second support member 44. Furthermore, movement of the module 10 in a rearward direction is prevented or opposed by the contact between the rear surface 34d of the mounting member 34 and the front surface 44c of the second support member 44.

The mounting member 34 is coupled to the second support member 44 by the one or more third coupling members 49, thereby to secure the module 10 to the dock 40. In this embodiment, the one or more third coupling members 49 are one or more bolts.

Since the second support member 44 of the dock 40 is separated from the first support member 42 by an adjustable separation distance, and the module 10 is mounted to the second support member 44, a distance between the bottom side 29 of the module 10 and the rest surface to which the first support member 42 is coupled is adjustable.

Figure 6 is a schematic illustration (not to scale) showing a perspective view of the bottom side 29 of the module 10 according to the first embodiment. The one or more feet 32 are each adjustable to alter a distance between a bottom surface of the foot and the platform 24. Each foot 32 may, for example be wedge-shaped and comprise an adjustable bolt which is adjustable to alter said distance. Said bolt may be manually adjustable using a tool (e.g. a wrench) to alter said distance. Thus, the one or more feet 32 are adjustable to alter a distance between the platform 24 and a rest surface on which the one or more feet 32 rest.

The module 10 further comprises one or more fourth coupling members 50 configured to couple the platform 24 directly to the rest surface, thereby to secure the platform 24 to the rest surface that the one or more feet 32 rest on. In this embodiment, the fourth coupling members are located at the front and bottom sides 26, 29 of the module 10. In this embodiment, the fourth coupling members 50 are one or more "seismic bolts", i.e. bolts capable of withstanding forces generated by earthquakes.

Figure 7 is a flowchart showing various steps of a method of mounting the module 10 to the dock 40 according to the first embodiment.

It will be appreciated that some of the process steps depicted in the flowchart of Figure 7 and described below may be omitted or performed in differing order to that presented below and shown in Figure 7. Furthermore, although the process steps have, for convenience and ease of understanding, been depicted as discrete temporally-sequential steps, nevertheless some of the process steps may in fact be performed simultaneously or at least overlapping to some extent temporally.

In step s2, a user adjusts the one or more feet 32 of the module 10 so that the distance between a bottom surface of the one or more feet 32 and the platform 24 is a predetermined distance. The predetermined distance may be the largest distance that the one or more feet 32 can be adjusted to (i.e. corresponding to the highest position that the one or more feet 32 can support the rest of the module 10 above a rest surface).

In step s4, a user couples the first support member 42 of the dock 40 to a rest surface (e.g. a floor) using the one or more second coupling members 48. For example, the user may drill holes in the rest surface and couple the first support member 42 to the rest surface using the one or more second coupling members 48 and the drilled holes.

In step s6, the user adjusts the one or more first coupling members 46 such that, when the first and second support members 42, 44 are coupled to each other using the one or more first coupling members 46, the first and second support members 42, 44 are separated by a pre-determined separation distance. The pre-determined separation distance is selected by the user such that, when the first and second support members 42, 44 are coupled to each other using the one or more first coupling members 46, the top surface of the second support member 64 is at the same vertical level as the top surface of the second support members 64 of one or more other docks 40 of the system 2. In other words, the pre-determined separation distance is selected such that, when the first and second support members 42, 44 are coupled to each other using the one or more first coupling members 46, the top surface of the second support member 44 is flush with the top surface of the second support members 44 of one or more other docks 40 of the system 2. The pre-determined separation distance may be selected based on a prior survey carried out by the user which indicates variations in the level of the rest surface to which the dock 40 is coupled. In step s8, the user couples the second support member 44 of the dock 40 to the first support member 42 using the one or more first coupling members 46. The coupling is such that the first and second support members 42, 44 are locked to each other at the predetermined separation distance that the one or more first coupling members 46 have been adjusted to provide.

In step s10, the user positions the module 10 such that the mounting member 34 of the module 10 is located above (or over) the dock 40. More specifically, the module 10 is positioned on the rest surface such that the module 10 rests on the one or more feet 32 of the module 10 and the mounting member 34 is located above the dock 40.

In step s10, the user mounts the module 10 to the dock 40 by adjusting the one or more feet 32 to lower the module 10 such that the mounting member 34 of the module 10 moves downwards into engagement with the second support member 44 of the dock 40. In step s12, the user couples the mounting member 34 to the second support member 44 of the dock 40 using one or more third coupling members 49. In step s14, the user couples the platform 24 of the module 10 to the rest surface using the one or more fourth coupling members 50.

Figure 8 a schematic illustration (not to scale) showing a dock 60 according to a second embodiment.

In this embodiment, the dock 60 comprises three mounts; a first mount 60a, a second mount 60b, and a third mount 60c. The second and third mounts 60b, 60c are positioned to perpendicularly abut the first mount 60a at different respective ends of the first mount 60a. The second and third mounts 60b, 60c also extend from their respective ends of the first mount 60a parallel to each other and in the same direction. In other words, the first, second and third mounts 60a, 60b, 60c are arranged in a U-shape. Thus, in this embodiment, the dock is U-shaped (e.g. a U-shape with straight sides).

Each of the first, second and third mounts 60a, 60b, 60c comprises a first support member 62, a second support member 64, one or more first coupling members 66, one or more second coupling members 68 and one or more hooks (or clamps) 70. The first support member 62 of each mount 60a, 60b, 60c is coupled to the second support member 64 of that mount 60a, 60b, 60c by the one or more first coupling members 66 of that mount 60a, 60b, 60c. The first support member 62 of each mount 60a, 60b, 60c is also couplable to a rest surface (e.g. a floor) by the one or more second coupling members 68 of that mount 60a, 60b, 60c. In this embodiment, each of the first and second support members 62, 64 is an elongate member with a rectangular transverse cross-section (e.g. elongate plate). Also, in this embodiment, the second coupling members 68 are seismic bolts, i.e. bolts capable of withstanding forces generated by earthquakes. The first support member 62 of each mount 60a, 60b, 60c comprises a top surface 62a and a bottom surface 62b opposite the top surface 62a. Similarly, the second support member 64 of each mount 60a, 60b, 60c comprises a top surface 64a and a bottom surface 64b opposite the top surface 64a.

The one or more first coupling members 66 of each mount 60a, 60b, 60c couple the first support member 62 of that mount 60a, 60b, 60c to the second support member 64 of that mount 60a, 60b, 60c such that the first and second support members 62, 64 of that mount 60a, 60b, 60c are secured to each other while also being separated from each other by a separation distance. More specifically, the coupling is such that the bottom surface 64b of the second support member 64 of each mount 60a, 60b, 60c is separated from the top surface 62a of the first support member 62 of that mount 60a, 60b, 60c by the separation distance.

The one or more first coupling members 66 of each mount 60a, 60b, 60c are adjustable to alter a separation distance between the first support member 62 of that mount 60a, 60b, 60c and the second support member 64 of that mount 60a, 60b, 60c. This allows the first and second support members 62, 64 of each mount 60a, 60b, 60c to be coupled to each other with each of a plurality of different separation distances. The separation distance may, for example, be in the range 0mm-23mm, e.g. 0mm, 1 mm, 2mm, 3mm, 4mm, 5mm, 6mm, 7mm, 8mm, 9mm, 10mm, 1 1 mm, 12mm, 13mm, 14mm, 15mm, 16mm, 17mm, 18mm, 19mm, 20mm, 21 mm, 22mm, 23mm. In this embodiment, the one or more first coupling members 46 are one or more adjustable bolts or screws.

The one or more hooks 70 of each mount 60a, 60b, 60c are for hooking onto a module 10 of the vacuum pumping and/or abatement system 2 so as to prevent or oppose movement of the module 10 relative to the dock 60 in one or more directions. The one or more hooks 70 are each attached to a top surface 64a of the second support member 64 of one of the mounts 60a, 60b, 60c. The hooks 70 will be described in more detail below with reference to Figures 9 and 10. Figure 9 is a schematic illustration (not to scale) of a perspective view of the dock 60 and a module 10 according to the second embodiment.

The module 10 comprises an apparatus (not shown), one or more facilities lines (not shown), one or more vacuum pumping and/or abatement lines (not shown), a frame 22, one or more protrusions 72, and one or more third support members 74.

The module 10 has a front side 26, a rear side 27, a top side 28, a bottom side 29, and two opposing lateral sides 30.

The apparatus is disposed at least partially (or wholly) within the frame 22. In other words, the frame 22 defines a space and the apparatus is at least partially (or wholly) disposed within the space. The apparatus may, for example, be a vacuum pumping and/or abatement apparatus.

The frame 22 comprises a plurality of interconnected bars 25.

The facilities lines may include one or more lines which are configured to receive facilities fluid from outside the module 10, direct the facilities fluid through the module 10, and discharge the facilities fluid out of the module 10 (e.g. to another module or out of the system 2 entirely). The facilities lines may include one or more lines which are configured to convey electrical power, electrical signals, or optical signals through the module 10. The vacuum pumping and/or abatement lines are configured to receive gas pumped from the entity 4, direct the pumped gas through the module 10, and discharge the pumped gas out of the module 10 (e.g. to another module 10 or out of the system 2 entirely). The dock 60 is configured to receive the module 10 to allow the module 10 to be mounted to the dock 60. More specifically, the dock 60 is configured to receive the module 10 such that the rear side 27 of the module 10 rests on the top surface 64a of the second support member 64 of the first mount 60a, one of the lateral sides 30 of the module 10 rests on the top surface 64a of the second support member 64 of the second mount 60b, and the other one of the lateral sides 30 of the module 10 rests on the top surface 64a of the second support member 64 of the third mount 60c.

One of the interconnected bars 25 of the frame 22 is configured to be engaged (or hooked onto) by a hook 70 of the first mount 60a of the dock 60. More specifically, a bar 25 at the rear 27 and bottom side 29 of the module 10 is configured to be engaged (or hooked onto) by that hook 70.

Each of the one or more protrusions 72 is coupled to the frame 22 and extends laterally towards an interior of the module 10. Each of the one or more protrusions 72 of the module 10 is configured to be engaged (or hooked onto) by a respective hook 70 of the second and third mounts 60b, 60c of the dock 60. In this embodiment, each of the one or more protrusions 72 is a cuboid block.

The one or more third support members 74 are configured to couple the module 10 to the rest surface and to support at least part of the weight of the module 10 above the rest surface. More specifically, the one or more third support members 74 are configured to couple the front side 26 of the module 10 to the rest surface and to support the weight of the front side 26 of the module 10 above the rest surface. In addition, the one or more third support members 74 act to prevent or oppose movement of the module 10 relative to the dock 60 in all directions (e.g. in a frontward direction). This prevents the module 10 from sliding out away from the dock 60. The one or more third support members 74 are each adjustable in length in order to allow them to support the front side 26 of the module 10 above the rest surface at a plurality of different heights. In this embodiment, each of the one or more third support members 74 is a cylindrical column through which a bolt can pass for bolting said column to the rest surface.

In this embodiment, a length of the module 10 (i.e. a size of the module 10 in a direction between the front and rear sides 26, 27 of the module 10) is greater than a length of the dock 60 (i.e. a size of the dock between front and rear sides of the dock 60). For example, the length of the module 10 may be 1310mm and the length of the dock 60 may be 1200mm. This tends to facilitate mounting of the module 10 onto the dock 60 since it provides extra space underneath the module 10 for equipment used to move the module 10 to reside in. Also, this difference in length tends to enable handling equipment (e.g. a handling trolley) to be rotated out from underneath the module 10 once the module 10 has been installed, if the amount of service space available is restricted (e.g. restricted to the size of a vacuum pump). Figure 10 is a schematic illustration (not to scale) showing a close-up perspective view of the module 10 and the dock 60 according to the second embodiment.

When the module 10 is mounted to the dock 60, the module 10 rests on the second support members 64 of the first, second and third mounts 60a, 60b, 60c such that a bottom surface of the module 10 is in contact with top surfaces of the second support members 64 of the first, second and third mounts 60a, 60b, 60c.

Furthermore, when the module 10 is mounted to the dock 60, one or more of the hooks 70 of the dock 60 engage (or hook onto) one or more protrusions 72 of the module 10, such that each protrusion 72 of the module 10 is engaged by a respective hook 70 of the dock 60. More specifically, each hook 70 that is engaged with a protrusion 72 is engaged such that a bottom surface of that hook 70 is in contact with a top surface of the protrusion 72 that it is engaged with (or hooked onto), and a lateral surface of that hook 70 is in contact with a lateral surface of the protrusion 72 that it is engaged with (or hooked onto). The contact between the top surfaces of the protrusions 72 and bottom surfaces of the hooks 70 prevents or opposes movement of the module 10 in an upwards direction relative to the dock 60. The contact between the lateral surfaces of the hooks 70 and the lateral surfaces of the protrusions 72 prevents or opposes movement of the module 10 in lateral directions relative to the dock 60. Also, when the module 10 is mounted to the dock 60, one of the bars 25 of the frame 22 at the rear 27 and bottom side 29 of the module 10 is engaged (or hooked onto) by a respective hook 70 of the first mount 60a. More specifically, the bar 25 is engaged with the hook 70 such that a bottom surface of the hook 70 is in contact with a top surface of the bar 25, and a front surface of the hook 70 is in contact with a rear surface of the bar 25. The contact between the top surface of the bar 25 and the bottom surface of the hook 70 prevents or opposes movement of the module 10 in an upwards direction relative to the dock 60. The contact between the rear surface of the bar 25 and the front surface of the hook prevents or opposes movement of the module 10 in a rearward direction relative to the dock 60.

Figure 1 1 is a flowchart showing various steps of a method of mounting the module 10 to the dock 60 according to the second embodiment.

It will be appreciated that some of the process steps depicted in the flowchart of Figure 1 1 and described below may be omitted or performed in differing order to that presented below and shown in Figure 1 1 . Furthermore, although the process steps have, for convenience and ease of understanding, been depicted as discrete temporally-sequential steps, nevertheless some of the process steps may in fact be performed simultaneously or at least overlapping to some extent temporally. In step s22, a user couples the first support member 62 of each of the mounts 60a, 60b, 60c of the dock 60 to a rest surface (e.g. a floor) using the one or more second coupling members 68 of that mount 60a, 60b, 60c. For example, the user may drill holes in the rest surface and couple the first support member 62 to the rest surface using the one or more second coupling members 68 and the drilled holes. ln step s24, the user adjusts the one or more first coupling members 66 of each mount 60a, 60b, 60c such that, when the first and second support members 62, 64 of each mount 60a, 60b, 60c are coupled to each other using respective one or more first coupling members 66, the first and second support members 62, 64 of each mount 60a, 60b, 60c are separated by a respective predetermined separation distance. The respective pre-determined separation distances are selected by the user such that, when the first and second support members 62, 64 of each mount 60a, 60b, 60c are coupled to each other using respective one or more first coupling members 66, the top surfaces 64a of the second support members 64 of the first, second and third mounts 60a, 60b, 60c are at the same vertical level as each other. Also, the pre-determined separation distances are selected by the user such that, when the first and second support members 62, 64 of each mount 60a, 60b, 60c are coupled to each other using respective one or more first coupling members 66, the top surfaces 64a of the second support members 64 of the first, second and third mounts 60a, 60b, 60c are at the same vertical level as the top surfaces of the second support members of one or more other docks 60 of the system 2. In other words, the predetermined separation distances are selected such that, when the first and second support members 62, 64 of each mount 60a, 60b, 60c are coupled to each other using respective one or more first coupling members 66, the top surfaces 64a of the second support members 64 of the first, second and third mounts 60a, 60b, 60c are flush with each other and also flush with the top surfaces of the second support members of one or more other docks 60 of the system 2. The pre-determined separation distances may be selected based on a survey carried out by the user prior to installation of the dock 60 which indicates variations in the level of the rest surface to which the dock 60 is coupled.

In step s26, the user couples the second support member 64 of each of the mounts 60a, 60b, 60c of the dock 60 to the first support member 62 of that mount 60a, 60b, 60c using the one or more first coupling members 66 of that mount 60a, 60b, 60c. The coupling is such that the first and second support members 62, 64 of each mount 60a, 60b, 60c are locked to each other at the respective predetermined separation distance that the respective one or more first coupling members 46 have been adjusted to provide.

In step s28, the user positions (or places) the module 10 onto the dock 60 such that the rear side 27 of the module 10 rests on the top surface 64a of the second support member 64 of the first mount 60a, one of the lateral sides 30 of the module 10 rests on the top surface 64a of the second support member 64 of the second mount 60b, and the other one of the lateral sides 30 of the module 10 rests on the top surface 64a of the second support member 64 of the third mount 60c. For example, the user may place the module 10 onto the dock 60 by transferring the module 10 onto the dock 60 from a cart used to carry and move the module 10 to the location of the dock 60. Alternatively, the module 10 may have wheels for moving the module 10 to the location of the dock 60. Wheels may facilitate sliding of the module 10 on the dock 60. At this stage, the placement of the module 10 is such that the hooks 70 are not engaged with the one or more protrusions 72 and the bar 25 at the rear and bottom side of the module 10. More specifically, each protrusion 72 is offset from a respective hook 70 of the second and third mounts 60b, 60c in a lengthwise direction of the module 10, and the bar 25 at the bottom and rear side of the module 10 is offset from a hook 70 of the first mount 60a in the lengthwise direction of the module 10. The offset distance may, for example, be 65mm.

In step s30, the user slides the module 10 rearwards so that each of the hooks 70 of the second and third mounts 60b, 60c engages (or hooks onto) a respective protrusion 72, and the hook 70 of the first mount 60a engages (or hooks onto) the bar 25 at the bottom and rear side of the module 10. In step s32, the user couples the front side 26 of the module 10 to the rest surface using the one or more third support members 74, thereby to support the front side 26 of the module 10 above the rest surface.

Thus, a dock and module of a vacuum pumping and/or abatement system according to two different embodiments and mounting methods thereof are provided. The above described systems and methods advantageously tend to prevent modules of a vacuum pumping and/or abatement system from not being level with each other, thereby preventing damage to the vacuum pumping and/or abatement system which would result therefrom. The above described systems and methods advantageously tend to avoid the use of shims to perform levelling of vacuum pumping and/or abatement system equipment. This tends to enable levelling to be performed more easily.

The above described systems and methods advantageously tend to facilitate the installation of a vacuum pumping and/or abatement system on uneven or bumpy rest surfaces.

The above-described systems and methods advantageously tend to enable the creation of a level system using a relatively small amount of space.

The above-described systems and methods advantageously tend to provide a level system in which the weight of the modules is distributed over a relatively large area to avoid high stress concentrations.

The above-described systems and methods advantageously tend to enable extra equipment related to vacuum pumping and/or abatement systems to be placed underneath the modules (e.g. liquid capture apparatus or handling equipment). The use of hooks in the above-described second embodiment advantageously tends to facilitate easier mounting of the dock to the module.

The above described adjustable feet advantageously tend to enable levelling to be performed even with limited or no access to the rear of the modules, since the adjustable feet can be operated without rear access. In the above-described first and second embodiments, the first and second support members of the dock are elongate members with rectangular transverse cross-sections. However, in other embodiments, one or both of the first and second support members has a different shape, e.g. a non-elongate shape and/or a differently shaped transverse cross-section. In the above-described first embodiment, the mounting member of the module is an elongate member with an L-shaped transverse cross-section. However, in other embodiments, the mounting member has a different shape, e.g. a non-elongate shape and/or a differently shaped transverse cross-section. In the above-described first embodiment, the mounting member of the module is defined as a separate element to the interconnected bars of the frame of the module. However, in other embodiments, the mounting member is one of the interconnected bars.

In the above-described first embodiment, the first, second, third and fourth coupling members are bolts. However, in other embodiments, other types of coupling member are used for one or more of the first, second, third and fourth coupling members.

In the above-described second embodiment, the dock comprises one or more hooks. However, in other embodiments, the one or more hooks are omitted and the module is prevented from moving relative to the dock using a different mechanism, e.g. by bolting the module to the dock. In these embodiments, in the method of Figure 1 1 , step s30 is replaced with a step of coupling the module to the dock using a coupling mechanism (e.g. one or more bolts).

In the above-described second embodiment, the one or more protrusions of the module are cuboid blocks. However, in other embodiments, the one or more protrusions may be a different type of protrusion, e.g. differently shaped blocks.

In the above-described second embodiment, the first and second coupling members are bolts. However, in other embodiments, other types of coupling member are used for one or both of the first and second coupling members.

In the above-described second embodiment, the dock comprises one or more third support members. However, in other embodiments, the one or more third support members are omitted. ln the above-described second embodiment, the length of the dock is shorter than the length of the module. However, in other embodiments, the length of the dock is the same as or greater than the length of the module.

In the above described embodiments, the dock is U-shaped or a single elongate mount (e.g. line-shaped). However, in other embodiments, the dock has a different shape, e.g. L-shaped, I-shaped, X-shaped, T-shaped, C-shaped, cruciform shaped, H-shaped etc, or a combination thereof. In general, it will be appreciated that the dock may have any appropriate shape which is able to receive a vacuum-pumping and/or abatement system module. In some embodiments, the one or more first coupling members of the dock are adjustable so that the separation distance between the first and second support members varies along the length of the first and second support members. This advantageously tends to enable the top surface of the second support member to be kept level even when the rest surface is uneven along the length of the first and second support members.

REFERENCE NUMERAL KEY

2: modular vacuum pumping and/or abatement system

4: entity

6: fluid input line

8: exhaust line

10: module

12: apparatus

14: facilities supply

16: facilities input lines

20: facilities lines

21 : vacuum pumping and/or abatement lines

22: frame

24: platform

25: interconnected bars

26: front side

27: rear side

28: top side

29: bottom side

30: lateral side

32: foot

34: mounting member

34a: top surface of mounting member

34b: bottom surface of mounting member

34c: front surface of mounting member

34d: rear surface of mounting member

40: dock 40a: mount

42: first support member

42a: top surface of first support member

42b: bottom surface of first support member 42c: front surface of first support member

42d: rear surface of first support member

44: second support member

44a: top surface of second support member

44b: bottom surface of second support member 44c: front surface of second support member

44d: rear surface of second support member

46: first coupling member

48: second coupling member

49: third coupling member

50: fourth coupling member

60: dock

60a: first mount

60b: second mount

60c: third mount

62: first support member

62a: top surface of first support member

62b bottom surface of first support member

64: second support member

64a: top surface of second support member 64b: bottom surface of second support member

66: first coupling member 68: second coupling member

70: hook

72: protrusion

74: third support member