VACUUM TREATMENT DEVICE

WIPO Patent Application WO/2006/003880

A1

[PROBLEMS] To provide a vacuum treatment device enabling the easy replacement of a treatment chamber. [MEANS FOR SOLVING PROBLEMS] This vacuum treatment device (1) comprises the treatment chamber (20) and a carrying-in-and-out chamber (10). The carrying-in-and-out chamber (10) is fixed to the upper side of the treatment chamber (20). On the other hand, since the treatment chamber (20) is formed to be lowered by a lift mechanism (50), when the treatment chamber (20) is lowered, the treatment chamber (20) is separated from the carrying-in-and-out chamber (10). Also, since a carrying means (30) is connected to the treatment chamber (20), the treatment chamber (20) can be easily transported after the treatment chamber (20) is removed from the carrying-in-and-out chamber (10). Thus, an operation for replacing the treatment chamber (20) can be performed easier than before.

JP5433171	Sample temperature control method
JPH0778820	FORMATION OF THIN FILM PATTERN
JPS5269575	ORGANIC BODY RESIDUUM DETECTION METHOD

TAKAHASHI SEIICHI (JP)
MIYAYA TAKEHISA (JP)
LIM SOO BOO (JP)
SATOU MASAYUKI (JP)
TSUTSUMI KENGO (JP)
ONO YOHEI (JP)

PCT/JP2005/011808

January 12, 2006

June 28, 2005

Click for automatic bibliography generation  

ULVAC INC (JP)
TAKAHASHI SEIICHI (JP)
MIYAYA TAKEHISA (JP)
LIM SOO BOO (JP)
SATOU MASAYUKI (JP)
TSUTSUMI KENGO (JP)
ONO YOHEI (JP)

H01L21/3065; (IPC1-7): H01L21/3065

JP2000182967A	2000-06-30
JP2002280438A	2002-09-27
JP2001035842A	2001-02-09
JPH08111449A	1996-04-30
JP2000273631A	2000-10-03

Ishijima, Shigeo (3F 1-2-18 Toranomo, Minato-ku Tokyo 01, JP)

View/Download PDF      PDF Help

Previous Patent: OPERATION FORCE TRANSMISSION MECHANISM AND SADDLE-RIDING-TYPE VEHICLE

Next Patent: METHOD FOR MANUFACTURING MOLD HAVING BAKED LUBRICANT RELEASING AGENT LAYER