Title:
VACUUM VALVE HAVING PROTECTIVE COVER FOR PROTECTING BARRIER FILM
Document Type and Number:
WIPO Patent Application WO/2022/065528
Kind Code:
A1
Abstract:
The present invention relates to a vacuum valve having a protective cover for protecting a barrier film which protects a barrier film that prevents an exhaust gas passing through a valve main body from flowing into a valve driver, thereby maximizing the life of the vacuum valve, and is characterized by comprising the barrier film which is installed in a main body chamber so as to block a gap of a piston rod through-hole formed such that a piston rod can pass through between the valve body and a valve power unit, thereby preventing the exhaust gas flowing into the main body chamber from flowing into the valve power unit through the piston rod through-hole, and further comprising the protective cover for protecting the barrier film, wherein the protective cover is formed to be long downward from the ceiling of the main body chamber and surrounds the outside of the barrier film with a space therebetween to block the exhaust gas from approaching the barrier film.
Inventors:
NA MYUNG SOO (KR)
Application Number:
PCT/KR2020/012773
Publication Date:
March 31, 2022
Filing Date:
September 22, 2020
Export Citation:
Assignee:
MST CO LTD (KR)
International Classes:
F16K51/02; F16K7/12; F16K17/02; F16K25/00; F16K31/122; F16K49/00; H01L21/67
Foreign References:
| KR20150074114A | 2015-07-01 | |||
| KR20030055103A | 2003-07-02 | |||
| KR20090023146A | 2009-03-04 | |||
| JP2015068438A | 2015-04-13 | |||
| US20190271410A1 | 2019-09-05 |
Attorney, Agent or Firm:
OH, Wihwan (KR)
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