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Title:
VANADIUM SILICARBIDE FILM, VANADIUM SILICARBIDE FILM-COATED MEMBER, AND METHOD FOR PRODUCING VANADIUM SILICARBIDE FILM-COATED MEMBER
Document Type and Number:
WIPO Patent Application WO/2021/065865
Kind Code:
A1
Abstract:
Provided is a vanadium silicarbide film comprising vanadium, silicon, and carbon, and the total of the vanadium element concentration, the silicon element concentration, and the carbon element concentration in the film is at least 90 at%.

Inventors:
HABUKA SATORU (JP)
MATSUOKA HIROYUKI (JP)
Application Number:
PCT/JP2020/036806
Publication Date:
April 08, 2021
Filing Date:
September 29, 2020
Export Citation:
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Assignee:
DOWA THERMOTECH CO LTD (JP)
International Classes:
C23C16/30; C01B33/00; C23C16/50
Foreign References:
JPH07300649A1995-11-14
JP2019035108A2019-03-07
JPH10225824A1998-08-25
Attorney, Agent or Firm:
HAGIWARA, Yasushi et al. (JP)
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