Title:
VERTICAL CAVITY SURFACE EMITTING LASER ELEMENT, METHOD FOR MANUFACTURING VERTICAL CAVITY SURFACE EMITTING LASER ELEMENT, AND PHOTOELECTRIC CONVERSION DEVICE
Document Type and Number:
WIPO Patent Application WO/2021/192533
Kind Code:
A1
Abstract:
[Problem] To provide a vertical cavity surface emitting laser element having excellent electric responsiveness and high productivity and reliability, a method for manufacturing the vertical cavity surface emitting laser element, and a photoelectric conversion device. [Solution] A vertical cavity surface emitting laser element according to the present technology is equipped with a semiconductor laminate. The semiconductor laminate is provided with: a first mirror having a first conductivity type; a second mirror having a second conductivity type and causing optical resonance together with the first mirror; an activation layer disposed between the first mirror and the second mirror; and a constriction layer having a non-oxidized region that is disposed between the first mirror and the second mirror and that is formed from a first material, and an oxidized region that is disposed around the non-oxidized region and that is formed from a second material obtained by oxidizing the first material. The semiconductor laminate has: a mesa that has an outer peripheral surface from which the end surfaces of the constriction layer and the activation layer are exposed; and an ion injection region that has ions injected therein, is formed to reach a predetermined depth in the activation layer and the constriction layer from the outer peripheral surface, and is spaced apart from the non-oxidized region.
Inventors:
WATANABE YOSHIAKI (JP)
YAMAUCHI YOSHINORI (JP)
KIMURA HIDEKI (JP)
MASUI YUJI (JP)
YAMAUCHI YOSHINORI (JP)
KIMURA HIDEKI (JP)
MASUI YUJI (JP)
Application Number:
PCT/JP2021/001194
Publication Date:
September 30, 2021
Filing Date:
January 15, 2021
Export Citation:
Assignee:
SONY SEMICONDUCTOR SOLUTIONS CORP (JP)
International Classes:
H01S5/183
Foreign References:
| JPH1168227A | 1999-03-09 | |||
| JP2007294741A | 2007-11-08 | |||
| JP2005044964A | 2005-02-17 | |||
| US20030123502A1 | 2003-07-03 | |||
| JPH05235473A | 1993-09-10 | |||
| US20190305522A1 | 2019-10-03 |
Attorney, Agent or Firm:
OMORI, Junichi (JP)
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