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Title:
VIBRATION-POWERED GENERATION ELEMENT
Document Type and Number:
WIPO Patent Application WO/2020/101014
Kind Code:
A1
Abstract:
A vibration-powered generation element with a three-terminal structure, said vibration-powered generation element comprising: a pair of fixed electrode parts that have a plurality of fixed comb teeth and are positioned such that the plurality of fixed comb teeth are facing; and a movable electrode part that is positioned between the pair of fixed electrode parts and has a pair of pluralities of movable comb teeth, said movable comb teeth being inserted between the plurality of fixed comb teeth of each fixed electrode part, said fixed comb teeth and/or said movable comb teeth having been made an electret, wherein a gap dimension of a gap region between the fixed comb teeth and the movable comb teeth is smaller than 20μm, and an aspect ratio, which is the ratio between a comb teeth height direction dimension of the gap region and the gap dimension of the gap region, is 20 or more.

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Inventors:
TOSHIYOSHI HIROSHI (JP)
HONMA HIROAKI (JP)
MITSUYA HIROYUKI (JP)
Application Number:
PCT/JP2019/044860
Publication Date:
May 22, 2020
Filing Date:
November 15, 2019
Export Citation:
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Assignee:
UNIV TOKYO (JP)
SAGINOMIYA SEISAKUSHO INC (JP)
International Classes:
H02N1/00; B08B5/00; B81B3/00
Domestic Patent References:
WO2015019919A12015-02-12
Foreign References:
JP2016082836A2016-05-16
JP2011087384A2011-04-28
JP2013013256A2013-01-17
JPS5627130B21981-06-23
JP2018088780A2018-06-07
JP2013013256A2013-01-17
JP2016082836A2016-05-16
JP2018215630A2018-11-16
Other References:
"High aspect ratio etching- Ultra precise-shape control in deep silicon etching (DEEP RIE)", NANOTECHJAPAN BULLETIN, vol. 8, no. 1, 5 March 2015 (2015-03-05), pages 1 - 6, XP009527288, Retrieved from the Internet
See also references of EP 3883117A4
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
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