VIBRATION SENSOR AND AUDIO DEVICE

WIPO Patent Application WO/2020/258171

A1

Provided in the present utility model are a vibration sensor and an audio device. The vibration sensor comprises a cavity with an inner wall as well as an elastic piece, a mass piece and an MEMS chip with a back cavity all arranged in the cavity, the elastic piece is attached to the inner wall, the mass piece is installed on the side face, facing away from the inner wall, of the elastic piece, the MEMS chip is installed on the side face, facing away from the elastic piece, of the mass piece, the inner wall comprises an attaching face fixedly connected to the elastic piece, the attaching face is recessed in the direction away from the elastic piece to form a concave cavity, the elastic piece covers the concave cavity, furthermore, the elastic piece is provided with a first through hole in communication with the concave cavity, the mass piece is provided with a second through hole in communication with the first through hole, and the first through hole and the second through hole are in communication with the back cavity and the concave cavity. The vibration sensor provided in the present utility model is simple in structure, small in height and high in sensitivity.

ZHANG JINYU (CN)

PCT/CN2019/093333

December 30, 2020

June 27, 2019

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AAC ACOUSTIC TECH SHENZHEN CO LTD (CN)

H04R19/04

CN108055604A	2018-05-18
CN208434106U	2019-01-25
CN109557555A	2019-04-02
CN202587368U	2012-12-05
CN103220610A	2013-07-24
CN109451384A	2019-03-08

GUANGZHOU YUEXIU JILY PATENT & TRADEMARK LAW OFFICE (CN)

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