Title:
VIRTUAL MEASUREMENT DEVICE, VIRTUAL MEASUREMENT METHOD, AND VIRTUAL MEASUREMENT PROGRAM
Document Type and Number:
WIPO Patent Application WO/2020/111258
Kind Code:
A1
Abstract:
Provided are a virtual measurement device, a virtual measurement method, and a virtual measurement program enabling a highly accurate virtual measurement process. The virtual measurement device has: an acquisition unit for acquiring a chronological data group measured in the processing of an object, in a predetermined processing unit in a manufacturing process; and a learning unit for machine-learning a plurality of network units so that the result of combining output data outputted by processing the acquired chronological data group using the plurality of network units approaches inspection data for the result of processing the object in the predetermined processing unit in the manufacturing process.
Inventors:
TSUTSUI TAKURO (JP)
Application Number:
PCT/JP2019/046869
Publication Date:
June 04, 2020
Filing Date:
November 29, 2019
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
International Classes:
H01L21/02; G05B19/418; H01L21/66
Domestic Patent References:
| WO2018101722A2 | 2018-06-07 | |||
| WO2010119894A1 | 2010-10-21 |
Foreign References:
| JP2012004181A | 2012-01-05 | |||
| JP2014507801A | 2014-03-27 |
Attorney, Agent or Firm:
ITOH, Tadashige et al. (JP)
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