Title:
VISION INSPECTION MODULE, DEVICE INSPECTION SYSTEM INCLUDING SAME, AND DEVICE INSPECTION METHOD USING SAME
Document Type and Number:
WIPO Patent Application WO/2019/172689
Kind Code:
A1
Abstract:
The present invention relates to a vision inspection module, a device inspection system including same, and a device inspection method using same and, more specifically, to a vision inspection module for visually inspecting a semiconductor device, a device inspection system including same, and a device inspection method using same. The present invention provides a vision inspection module (100) for visually inspecting a device (1) having a rectangular plane shape, the vision inspection module (100) comprising: an image obtaining unit (110) for obtaining an image of the device (1); and an optical path forming unit (120) for selectively forming a first optical path (L1) allowing a first plane image of a first plane of the device (1) to reach the image obtaining unit (110), and a pair of second optical paths (L2) allowing a pair of side surface images of a pair of opposite side surfaces of the device (1) to reach the image obtaining unit (110).
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Inventors:
YOU HONG JUN (KR)
BAEK KYEONG HWAN (KR)
BAE SU MIN (KR)
JANG SUNG HA (KR)
BAEK KYEONG HWAN (KR)
BAE SU MIN (KR)
JANG SUNG HA (KR)
Application Number:
PCT/KR2019/002675
Publication Date:
September 12, 2019
Filing Date:
March 07, 2019
Export Citation:
Assignee:
JT CORP (KR)
International Classes:
G01N21/88; G01N21/17; G06T7/00; H01L21/66
Foreign References:
| KR20170024808A | 2017-03-08 | |||
| KR20110038482A | 2011-04-14 | |||
| KR20180010492A | 2018-01-31 | |||
| JPH0843043A | 1996-02-16 | |||
| US20100089884A1 | 2010-04-15 |
Attorney, Agent or Firm:
B&IP-JOOWON PATENT AND LAW FIRM (KR)
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