Title:
VISION INSPECTION MODULE AND ELEMENT HANDLER HAVING SAME
Document Type and Number:
WIPO Patent Application WO/2018/016889
Kind Code:
A1
Abstract:
The present invention relates to an element handler and, more specifically, to a vision inspection module for performing vision inspection on a semiconductor element, and to an element handler having the vision inspection module. The present invention provides a vision inspection module comprising: a first vision inspection part (40) for obtaining, for vision inspection, side images of the sides at one pair of opposite edges, among two pairs of mutually opposite edges, of a semiconductor element (10) having a rectangular planar shape; and a second vision inspection part (50) for obtaining side images of the sides at the other pair of opposite edges, among the two pairs of mutually opposite edges, of the semiconductor element (10) which has gone through the first vision inspection part (40).
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Inventors:
YOU HONG JUN (KR)
LEE MYEONG KUK (KR)
LEE MYEONG KUK (KR)
Application Number:
PCT/KR2017/007823
Publication Date:
January 25, 2018
Filing Date:
July 20, 2017
Export Citation:
Assignee:
JT CORP (KR)
International Classes:
G01N21/88; G01N21/17; G01N21/95; G02B26/10; H04N5/225
Foreign References:
| JP2015230257A | 2015-12-21 | |||
| KR20090133097A | 2009-12-31 | |||
| KR101275134B1 | 2013-06-17 | |||
| JP2015219035A | 2015-12-07 | |||
| JP2000039307A | 2000-02-08 |
Attorney, Agent or Firm:
B&IP-JOOWON PATENT AND LAW FIRM (KR)
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