Title:
WAFER CONTAINER CLEANING SYSTEM
Document Type and Number:
WIPO Patent Application WO2004042789
Kind Code:
A3
Abstract:
A system (10) and method for cleaning boxes used for handling flat media includes a rotor rotatably mounted within an enclosure (12), with spray nozzles (20) in the enclosure (12) for spraying fluid toward the rotor. The rotor has at least one box holder assembly for holding a box. At least one retainer bar is located on the rotor for engaging a front section of the box to retain the box in the box holder assembly during rotation of the rotor. The retainer bar is preferably moveable from a first position where the retainer bar restrains the box on the box holder assembly, to a second position where the retainer bar is moved away from the box.
More Like This:
Inventors:
DOLECHEK KERT (US)
DAVIS JEFFRY (US)
DAVIS JEFFRY (US)
Application Number:
PCT/US2003/032131
Publication Date:
October 07, 2004
Filing Date:
October 10, 2003
Export Citation:
Assignee:
SEMITOOL INC (US)
DOLECHEK KERT (US)
DAVIS JEFFRY (US)
DOLECHEK KERT (US)
DAVIS JEFFRY (US)
International Classes:
B08B9/08; B08B9/28; H01L21/00; H01L21/673; (IPC1-7): B08B3/02
Foreign References:
| US6691718B2 | 2004-02-17 | |||
| US6412502B1 | 2002-07-02 | |||
| US6322633B1 | 2001-11-27 |
Download PDF: