WAFER TRANSMISSION BOX

WIPO Patent Application WO/2023/221277

A1

Disclosed in the present invention is a wafer transmission box, which comprises a box body with an opening in one side, wherein the box body defines a main cavity. The main cavity is internally provided with a grid frame for storing wafers, and the grid frame divides the main cavity into a plurality of wafer slots which are configured to store single wafers. An opening plate set fixed to the box body is arranged at the opening of the box body, a plurality of wafer exchanging ports communicating with the main cavity and an outside space are formed in the opening plate set, and the number and position of the wafer exchanging ports match the wafer slots. Each wafer exchanging port can be opened and closed by means of a valve assembly. A wafer detection device is further arranged on the box body and configured to detect the pose of the wafer in the main cavity. The valve assembly has a compact structure, and a door opening device of a wafer loader can be omitted, thereby saving space and simplifying the complexity of the structure. In addition, the wafer pose detection function is achieved, so as to find problems in time, thereby avoiding damage to wafers and wafer taking and placing manipulator fingers.

YE YING (CN)
BAO WEICHENG (CN)
WANG WENGUANG (CN)
WANG XUCHEN (CN)
ZHU JIAHUI (CN)

PCT/CN2022/105367

November 23, 2023

July 13, 2022

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SHANGHAI GONA SEMICONDUCTOR TECH CO LTD (CN)
WUHAN BRANCH OF SHANGHAI GONA SEMICONDUCTOR TECH CO LTD (CN)

H01L21/67; H01L21/673

CN114628292A	2022-06-14
US20130319907A1	2013-12-05
CN1378515A	2002-11-06
CN1615388A	2005-05-11
CN101677074A	2010-03-24
JP2005162263A	2005-06-23

SUZHOU HUICHENG HUIZHI PATENT AGENCY (GENERAL PARTNERSHIP) (CN)

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