Title:
WAVEFRONT MEASUREMENT DEVICE, AND WAVEFRONT MEASUREMENT METHOD
Document Type and Number:
WIPO Patent Application WO/2021/049007
Kind Code:
A1
Abstract:
This wavefront measurement device is configured provided with: a reading unit (9) which, when light transmitted through a test piece (2) or light reflected by the test piece (2) is condensed by each of multiple lenses (6-1)-(6-N) and images (61) of the light condensed by the multiple lenses (6-1)-(6-N) are then formed by a light receiving unit (8), reads two or more images (61) of the multiple images (61) formed by the light receiving unit (8); a relative position calculation unit (11) which, by calculating the correlation between the two or more images (61) read by the reading unit (9), calculates the relative positions of the two or more images (61); and a wavefront calculation unit (12) which calculates the wavefront of the light transmitted through the test piece (2) or the light reflected by the test piece (2) from the relative positions calculated by the relative position calculation unit (11).
Inventors:
ENDO TAKAO (JP)
MIWA YOSHICHIKA (JP)
ANDO TOSHIYUKI (JP)
MIWA YOSHICHIKA (JP)
ANDO TOSHIYUKI (JP)
Application Number:
PCT/JP2019/036116
Publication Date:
March 18, 2021
Filing Date:
September 13, 2019
Export Citation:
Assignee:
MITSUBISHI ELECTRIC CORP (JP)
International Classes:
G01J9/00; A61B3/10; G01M11/00; G01M11/02
Foreign References:
| JP6509456B1 | 2019-05-08 | |||
| JP2012047506A | 2012-03-08 | |||
| US20030048413A1 | 2003-03-13 | |||
| JP2009258046A | 2009-11-05 |
Attorney, Agent or Firm:
TAZAWA, Hideaki et al. (JP)
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