Title:
WAVEGUIDE STRUCTURE AND MANUFACTURING METHOD THEREFOR, AND PHOTONIC INTEGRATED CIRCUIT AND MANUFACTURING METHOD THEREFOR
Document Type and Number:
WIPO Patent Application WO/2023/109695
Kind Code:
A1
Abstract:
Disclosed are a waveguide structure and a manufacturing method therefor, and a photonic integrated circuit and a manufacturing method therefor. The manufacturing method for the waveguide structure comprises: forming a first material layer; forming a first waveguide and a second waveguide on the basis of the first material layer, the first waveguide and the second waveguide having an interval; forming a second material layer; and forming a waveguide coupling structure on the basis of the second material layer, wherein the waveguide coupling structure is optically coupled to the first waveguide and the second waveguide, such that the first waveguide and the second waveguide realize optical connection. The waveguide connection range can be not limited to the area defined by one exposure, the waveguides in different exposure areas are interconnected, the alignment precision requirement during waveguide interconnection is reduced, and the joint defect during waveguide connection can be effectively avoided.
Inventors:
SU ZHAN (CN)
SETIADI DADI (CN)
XU YELONG (CN)
WU JIANHUA (CN)
BAI YANFEI (CN)
ZHU YUNPENG (CN)
ZOU JINGHUI (CN)
MENG HUAIYU (CN)
SHEN YICHEN (CN)
SETIADI DADI (CN)
XU YELONG (CN)
WU JIANHUA (CN)
BAI YANFEI (CN)
ZHU YUNPENG (CN)
ZOU JINGHUI (CN)
MENG HUAIYU (CN)
SHEN YICHEN (CN)
Application Number:
PCT/CN2022/138129
Publication Date:
June 22, 2023
Filing Date:
December 09, 2022
Export Citation:
Assignee:
SHANGHAI XIZHI TECH CO LTD (CN)
International Classes:
G02B6/122; G02B6/12; G02B6/136; G02B6/26
Foreign References:
| CN108292012A | 2018-07-17 | |||
| CN102944912A | 2013-02-27 | |||
| US20130315536A1 | 2013-11-28 | |||
| US20200124791A1 | 2020-04-23 |
Attorney, Agent or Firm:
PURPLEVINE INTELLECTUAL PROPERTY (SHENZHEN) CO., LTD. (CN)
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