Title:
WAVELENGTH-TUNABLE UV LASER OSCILLATION DEVICE FOR ULTRA-HIGH RESOLUTION MICROSCOPE LIGHT SOURCE AND METHOD THEREOF
Document Type and Number:
WIPO Patent Application WO/2017/018649
Kind Code:
A1
Abstract:
The purpose of the present invention is to provide a laser oscillation device, which has a short wavelength of 200 nm or less, is wavelength-tunable and features stable, high-output optical power, so as to achieve hundreds of nanometer-level, ultra-high resolution for an industrial microscope, and an oscillation method of the laser oscillation device. A UV laser oscillation device of the present invention comprises: an L-shaped vacuum chamber (100) comprising a pumping light input part (110), a light output part (120), a gas injection hole (130) and a gas discharge hole (140); a first lens (210) inserted into the pumping light input part (110); a second lens (220) inserted into the light output part (120); a filter (300) installed behind the second lens; a source holder (400) for supporting a metal source; and a drive part (500) comprising a motor (510) and a drive shaft (520).
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Inventors:
KIM SEUNG HYUN (KR)
KIM GEON HEE (KR)
HUR HWAN (KR)
LEE KYE SUNG (KR)
KIM GEON HEE (KR)
HUR HWAN (KR)
LEE KYE SUNG (KR)
Application Number:
PCT/KR2016/005461
Publication Date:
February 02, 2017
Filing Date:
May 24, 2016
Export Citation:
Assignee:
KOREA BASIC SCIENCE INST (KR)
International Classes:
H01S3/09; G02B21/00; H01S3/23
Foreign References:
| JP2002214400A | 2002-07-31 | |||
| KR20060085568A | 2006-07-27 | |||
| KR101172622B1 | 2012-08-08 | |||
| KR20050010525A | 2005-01-28 | |||
| KR20120069769A | 2012-06-28 |
Attorney, Agent or Firm:
PLUS INTERNATIONAL IP LAW FIRM (KR)
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