WIRE SAW ABNORMALITY DIAGNOSIS DEVICE AND METHOD

Title:

WIRE SAW ABNORMALITY DIAGNOSIS DEVICE AND METHOD

Document Type and Number:

WIPO Patent Application WO/2023/013509

Kind Code:

A1

Abstract:

A wire saw (1) abnormality diagnosis device comprises: a diagnostic mode execution unit (51), a data group acquisition unit (52), a deviation information calculation unit (54), and a determination unit (55). The diagnostic mode execution unit (51) respectively executes, before cutting by the wire saw (1), a first diagnostic mode in which a processing roller rotates at a fixed speed, a second diagnostic mode in which a feeding reel rotates at a fixed speed, and a third diagnostic mode in which a winding reel rotates at a fixed speed. The data group acquisition unit (52) acquires first to third data groups for a plurality of data items in each of the first to third diagnostic modes. The deviation information calculation unit (54) calculates deviation information relating to a deviation obtained by comparing the first to third data groups with first to third reference data groups occurring during a normal time. The determination unit (55) determines the presence or absence of an abnormality of the wire saw (1) on the basis of the deviation information. As a result, the operating state before cutting is sufficiently monitored and abnormality diagnosis is performed accurately in the wire saw.

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Inventors:

MURATA REIJI (JP)
AKI MITSURU (JP)
SHIMADA YURI (JP)
KAWATSU TOMOYUKI (JP)

Application Number:

PCT/JP2022/029034

Publication Date:

February 09, 2023

Filing Date:

July 27, 2022

Export Citation:

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Assignee:

KOMATSU NTC LTD (JP)

International Classes:

B24B27/06; B24B49/14; B24B49/16; B28D1/10; B28D5/04; H01L21/304

Domestic Patent References:

WO2012089243A1

2012-07-05

Foreign References:

JP2011148027A	2011-08-04
JP2000190196A	2000-07-11
JP2014166656A	2014-09-11
JP2011104688A	2011-06-02
JP2015203646A	2015-11-16
JP2000259222A	2000-09-22

Attorney, Agent or Firm:

ISONO INTERNATIONAL PATENT OFFICE, P.C. (JP)

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