Title:
WORKPIECE TRANSFER SYSTEM, TRANSFER METHOD, VACUUM CHUCK, AND WAFER CENTERING METHOD
Document Type and Number:
WIPO Patent Application WO/2002/052639
Kind Code:
A1
Abstract:
A wafer (W) transfer system (E) comprises a host computer (1) for managing the production of semiconductor devices, probers (2) for checking electrical characteristics of the wafer (W) under control by this host computer (1), an AGV (3) for automatically transferring wafers (W) in a carrier to deliver the wafers (W) one by one to these probers (2) in response to the request of each of the probers (2), and an AGV controller (4) for controlling this AGV (3) under control by the host computer.
More Like This:
| WO/2013/134019 | MOTORIZED WINDOW TREATMENT HAVING A BELT DRIVE |
Inventors:
AKIYAMA SHUJI (JP)
IIJIMA TOSHIHIKO (JP)
HOSAKA HIROKI (JP)
IIJIMA TOSHIHIKO (JP)
HOSAKA HIROKI (JP)
Application Number:
PCT/JP2001/011571
Publication Date:
July 04, 2002
Filing Date:
December 27, 2001
Export Citation:
Assignee:
TOKYO ELECTRON LTD (JP)
AKIYAMA SHUJI (JP)
IIJIMA TOSHIHIKO (JP)
HOSAKA HIROKI (JP)
AKIYAMA SHUJI (JP)
IIJIMA TOSHIHIKO (JP)
HOSAKA HIROKI (JP)
International Classes:
G05B19/00; G05B19/418; H01L21/00; H01L21/68; (IPC1-7): H01L21/68; B65G49/07; H01L21/02; B25J15/16
Foreign References:
| JPH06120316A | 1994-04-28 | |||
| JPH03289152A | 1991-12-19 | |||
| JPH0697262A | 1994-04-08 | |||
| US5742173A | 1998-04-21 | |||
| JPH0778860A | 1995-03-20 | |||
| JPH07297256A | 1995-11-10 | |||
| US5617338A | 1997-04-01 | |||
| EP0603396A1 | 1994-06-29 |
Other References:
See also references of EP 1357589A4
Attorney, Agent or Firm:
Yoshitake, Kenji (Fuji Bldg. 2-3 Marunouchi 3-chome Chiyoda-ku, Tokyo, JP)
Download PDF: