Title:
X-RAY DEVICE, X-RAY MEASUREMENT METHOD, AND STRUCTURE MANUFACTURING METHOD
Document Type and Number:
WIPO Patent Application WO/2017/141345
Kind Code:
A1
Abstract:
An X-ray device according to the present invention is provided with: a table (61) on which an index member (M) is provided and on which an object to be measured (S) is placed; an X-ray source (5) for irradiating X-rays onto the object to be measured and the index member; an X-ray detector (7) for detecting a projection image of the object to be measured and a projection image of the index member resulting from the irradiated X-rays; an acquisition unit for rotating at least two members from among the table, X-ray source, and X-ray detector around a prescribed axis (L) so as to irradiate X-rays onto the object to be measured from a plurality of different irradiation directions and obtain a projection image of the object to be measured and a projection image of the index member for each of the irradiation directions; and a correction unit (36) for carrying out correction processing on the basis of the amount of deviation (Δh, Δv) between the position (first projection position) at which the index member (M) is projected onto the detection surface (71) of the X-ray detector (7) in an ideal positional relationship between the X-ray detector (7) and the table (61) and the position (second projection position) at which the index member (M) is projected onto the detection surface (71) of the X-ray detector (7) when X-rays are actually irradiated onto the index member (M) moving in an orbit. The present invention makes it possible to suppress the occurrence of errors in the X-ray projection image data generated at each observation position and generate a highly accurate reconstructed image.
Inventors:
TANAKA TOSHIHISA (JP)
ENDO TAKESHI (JP)
MIYAZAKI MASAYA (JP)
ENDO TAKESHI (JP)
MIYAZAKI MASAYA (JP)
Application Number:
PCT/JP2016/054406
Publication Date:
August 24, 2017
Filing Date:
February 16, 2016
Export Citation:
Assignee:
NIKON CORP (JP)
International Classes:
G01N23/04
Domestic Patent References:
| WO2016021031A1 | 2016-02-11 |
Foreign References:
| JP2013096992A | 2013-05-20 | |||
| JP2013015426A | 2013-01-24 | |||
| JP2012042340A | 2012-03-01 | |||
| JP2009036660A | 2009-02-19 | |||
| US20080247505A1 | 2008-10-09 |
Attorney, Agent or Firm:
NAGAI, Fuyuki et al. (JP)
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