Title:
X-RAY DIFFRACTION MEASUREMENT APPARATUS
Document Type and Number:
WIPO Patent Application WO/2014/112031
Kind Code:
A1
Abstract:
This X-ray diffraction measurement apparatus is provided with a casing (60), said casing (60) having accommodated therein: an X-ray emitter (10) which emits X-rays towards an object (OB) to be measured; a table (20) having an imaging plate (21) attached thereto; a laser detection device (40) which irradiates the imaging plate (21) with laser light, receives emitted light, and outputs a received-light signal corresponding to the received-light intensity; a spindle motor (37) which causes the table (20) to rotate around a central axis; and a feed motor (32) which moves the table (20) in a direction parallel to a light-receiving surface of the imaging plate (21). The casing (60) is provided with an inclined-surface wall (67) which is placed upon the object (OB) to be measured. A through hole (67a) through which emitted X-rays are made to pass is provided in the inclined-surface wall (67). The inclined-surface wall (67) forms a prescribed angle with the direction of the optical axis of the emitted X-rays.
Inventors:
MARUYAMA YOICHI (JP)
Application Number:
PCT/JP2013/050515
Publication Date:
July 24, 2014
Filing Date:
January 15, 2013
Export Citation:
Assignee:
PULSTEC IND CO LTD (JP)
International Classes:
G01N23/207; G01B15/06; G01L1/00
Foreign References:
| JP2012225796A | 2012-11-15 | |||
| JP2012122737A | 2012-06-28 | |||
| JPH10185842A | 1998-07-14 | |||
| JP2012073193A | 2012-04-12 | |||
| JP2001013095A | 2001-01-19 | |||
| JPH10332608A | 1998-12-18 | |||
| JP2012251775A | 2012-12-20 |
Attorney, Agent or Firm:
PROSPEC PATENT FIRM (JP)
Patent business corporation Pros Peck patent firm (JP)
Patent business corporation Pros Peck patent firm (JP)
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