Title:
X-RAY GENERATOR, E-RAY EXPOSURE APPARATUS, AND X-RAY FILTER
Document Type and Number:
WIPO Patent Application WO/2004/027842
Kind Code:
A1
Abstract:
An X-ray generator comprises an X-ray source, a filter (100) through which X-rays emitted from the X-ray source pass, and drive mechanisms (102, 103, 104) of the filter (100) for moving, if necessary, the position on the filter (100) where X-rays pass. Therefore, even if the thickness of the filter is uneven, uneven exposure of the mask or resist is not caused, and the filter is not damaged by a thermal load.
Inventors:
KONDO HIROYUKI (JP)
OTA KAZUYA (JP)
OTA KAZUYA (JP)
Application Number:
PCT/JP2003/011506
Publication Date:
April 01, 2004
Filing Date:
September 09, 2003
Export Citation:
Assignee:
NIKON CORP (JP)
KONDO HIROYUKI (JP)
OTA KAZUYA (JP)
KONDO HIROYUKI (JP)
OTA KAZUYA (JP)
International Classes:
G21K3/00; G03F7/20; G21K1/10; G21K5/02; H01L21/027; H05G1/00; (IPC1-7): H01L21/027; G03F7/20; G21K5/00
Foreign References:
| JP2000349009A | 2000-12-15 | |||
| JPH08264422A | 1996-10-11 | |||
| JPH07333397A | 1995-12-22 | |||
| JPH05217857A | 1993-08-27 | |||
| JPH10340843A | 1998-12-22 |
Attorney, Agent or Firm:
Watanabe, Atsushi (1-20-10-203 Takadanobab, Shinjuku-ku Tokyo, JP)
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