Title:
X-RAY THIN FILM INSPECTION DEVICE
Document Type and Number:
WIPO Patent Application WO/2016/059673
Kind Code:
A1
Abstract:
This x-ray thin film inspection device is provided with: an x-ray irradiation unit (40) that is mounted on a first turning arm (32); an x-ray detector (50) that is mounted on a second turning arm (33); an x-ray fluorescence detector (60) that detects x-ray fluorescence that is generated from an inspection target due to x-ray irradiation; a temperature measurement unit (110) that measures a temperature that corresponds to the temperature of the x-ray thin film inspection device; and a temperature correction system (a central processing device (100)) that corrects an inspection position on the basis of the temperature measured by the temperature measurement unit (110).
Inventors:
OGATA KIYOSHI (JP)
OMOTE KAZUHIKO (JP)
ITO YOSHIYASU (JP)
MOTONO HIROSHI (JP)
YOSHIDA MUNEO (JP)
TAKAHASHI HIDEAKI (JP)
OMOTE KAZUHIKO (JP)
ITO YOSHIYASU (JP)
MOTONO HIROSHI (JP)
YOSHIDA MUNEO (JP)
TAKAHASHI HIDEAKI (JP)
Application Number:
PCT/JP2014/077336
Publication Date:
April 21, 2016
Filing Date:
October 14, 2014
Export Citation:
Assignee:
RIGAKU DENKI CO LTD (JP)
International Classes:
G01N23/20; G01N23/223
Foreign References:
| JP2006153767A | 2006-06-15 | |||
| JPH09218170A | 1997-08-19 |
Other References:
M.BECK ET AL.: "Simultaneous determination of specimen temperature and specimen displacement in high-temperature X-ray diffractometry applying Bragg-Brentano geometry", JOURNAL OF APPLIED CRYSTALLOGRAPHY, vol. 35, no. 1, 2002, pages 103 - 107
Attorney, Agent or Firm:
YAMAMOTO TOSHITAKE (JP)
Toshitake Yamamoto (JP)
Toshitake Yamamoto (JP)
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