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WO/2002/055271A1 |
A robotic arm (10) comprises a plurality of interconnected segments (12) which are flexible relative to each other to permit the arm (10) to be bent. A connection part (14) is provided at each end (22, 24) of the arm (10) for electrical ...
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WO/2002/045154A1 |
A transfer robot (5) for thin substrate capable of efficiently detecting the stored state of thin substrates and an inspection method for thin substrate capable of accurately detecting the stored state of thin substrates; the robot (5), ...
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WO/2002/040226A1 |
A biped robot (1), wherein the height thereof in upright posture from the floor surface contact end of a leg part link (2) to a shoulder joint is determined so as to come within a range (Havg + 1/2 $g(s)) set based on an averaged value (...
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WO/2002/034477A2 |
A robot drive assembly for moving a working tool in x, y, z and theta directions comprising three independent, coaxially nested tubes (12, 14, 16), each tube being driven around a common central axis by drive belts (80) attached to separ...
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WO/2002/016995A2 |
This invention relates to redundant robotic apparatus and methods of deploying them. The specification teaches the methodology and construction of a robotic arm device capable of accessing machinery and equipment, which is otherwise diff...
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WO/2002/006720A1 |
The invention concerns a robot vehicle whereof the train (1) of modules (2 to 6) forming the vehicle comprises springs (38) for linking successive modules while allowing a curvature of the train in the bent portions of a pipeline. Cables...
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WO/2002/004176A1 |
A substrate handling system comprises a robot (20) containing micro-environment (32) in communication with a plurality of processing stations (34). The robot (20) has a robot arm (30) comprising an end effector linkage (50) mounted to an...
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WO/2002/004919A2 |
The invention provides a method of assaying a mineral sample for determining the concentration of selected metals in a sample comprising the steps of providing a comminuted mineral sample; mixing such sample with a flux; preheating a rea...
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WO/2002/000392A1 |
The invention relates to a device for loading and unloading optical workpieces, for an optical machine. Said device comprises a loading arm (24) which is pivotally driven about an axis (A) and is pivoted in controlled movement sequences ...
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WO/2001/089773A1 |
The invention relates to a lift and turn drive unit, comprising a working element (2) which may be linearly displaced and rotated relative to at least one housing element (1), whereby the working element (2) is formed from at least one l...
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WO/2001/089772A1 |
The invention relates to a lift/swivel drive comprising a working element (2) which can traverse rotationally and linearly in relation to a housing element (1). In order to displace the working element in a controllable linear and rotati...
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WO/2001/080935A1 |
The invention concerns a positioning, operating and/or exploring device comprising two mounts (6a 6d, 7) and at least a cable (20) extending from one to the other mount (6a 6d, 7); it includes at least two bellows (10) directly fixed eac...
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WO/2001/079091A1 |
A dual paddle end effector robot (108) is disclosed which is capable of parallel processing of workpieces. The end effector (108) includes a lower paddle (250) rotatably coupled to an end of the distal link (106), and an upper paddle (25...
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WO/2001/060571A1 |
The present invention concerns an industrial robot according to the delta concept with an arm system (2) intended for rotation in space that comprises a base section (4), a movable plate (6), several jointed struts (8) and a telescopic s...
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WO/2001/017731A1 |
A fluid operated actuator (1) comprises a plurality of elongate parallel pressure chambers (6), each chamber comprising a plurality of individual bellows (7) connected end to end through at least one rigid connecting plate (2). Each conn...
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WO/2000/058059A1 |
The invention relates to an automation arm and a method for modifying the length thereof. Despite a simplified and cost-effective production method, said method allows an automation arm to be produced which requires a minimum of space, w...
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WO/2000/053377A1 |
A working robot used in space, designed so that in space it examines accommodation modules for their structure or makes a change of M/D shields so as to eliminate manual operation. The main body (1 (101, 201)) is provided with four multi...
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WO/2000/047913A1 |
Until now, a travelling brake was provided on the free end of the positioning arm, which dampened particularly the vibrations resulting from braking. According to the invention, vibrations are intercepted by a mechanically simple, hyster...
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WO/2000/041855A1 |
A wafer handling robot (100) is disclosed for transporting workpieces. The robot includes a base (102) comprising a rigid backbone (112) for providing stability to the robot. The base further includes a mast (116), a linear drive system ...
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WO/2000/040378A1 |
The slider crank mechanism based robot arm consists of a robot waist (2) rotating with respect to the robot base (1) and a closed kinematic chain planar mechanism which is connected to the robot waist by a revolute joint. The closed kine...
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WO/2000/035640A1 |
The present invention relates to an industrial robot according to the delta concept with an arm system (2) intended to rotate in space and that comprises a base station (4), a moveable plate (6), several multi-jointed pull rods (8) and a...
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WO/2000/029176A1 |
Semiconductor wafer processing chambers, for example, are often located in a high temperature corrosive environment, and if an arm having a belt, such as a steel belt, is carried into and out of such environment, the belt is exposed to t...
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WO/1999/047717A1 |
Positioning arms (1) for positioning and assembling systems are subjected to high accelerations and must therefore be designed so as to be lightweight but resistant to bending and twisting. Positioning arms (1) which are lightweight alth...
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WO/1999/033617A1 |
An arm structure for man type working robots, capable of eliminating to as great an extent as possible the occurrence of a singular point condition of a shoulder joint during a regular operation thereof, and securing a smooth motion of t...
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WO/1999/017244A1 |
A substrate transport apparatus comprising a robot transport arm (32) and a substrate aligner (42) located on the robot transport arm (32).
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WO/1999/014018A1 |
A robot for movement of a moveable element (2) relative to a base element (1) comprises at least two link devices (4, 5, 6) coupleed between the elements. These link devices comprise each at least two mutually articulated link units (7, ...
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WO/1999/003649A1 |
An industrial robot comprising a column (1) fixed to an installation base (BS), a first arm (J1) serving as a prismatic arm, a second arm (J2) serving as a swing arm, a third arm (J3) serving as a swing arm, and a fourth arm (J4) serving...
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WO/1998/056542A1 |
A substrate transport (12) having a housing (18), a drive assembly (22) connected to the housing (18), and a moveable arm assembly (20) operably connected to the drive assembly (22). The drive assembly (22) has a frame (26) stationarily ...
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WO/1998/049976A1 |
An artificial muscle made from high polymer elastic material and fibre has a tubular structure. The fibres are disposed evenly within the tube wall and on the interior and outer surface of the tube wall. The tubular structure is divided ...
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WO/1998/049569A1 |
A tester includes a manipulator (200) attached to a test head (1) for testing semiconductor devices having a range of motion in mutiple degrees of freedom. Vertical (500) and horizontal (600) bearing assemblies, an expansion joint (400),...
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WO/1998/045095A1 |
A method for controlling a handling robot provided in a transfer chamber (1) around which a plurality of process chamber stations (2e) are arranged through gates (6) and equipped with first and second transfer bases (8a, 8b) arranged wit...
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WO/1998/043782A1 |
A modular articulated robot structure (fig. 4) composed of a series of independent modules (10, 100, 300) releasably connected to each other to form various configurations. The modules (10, 100, 300) may be of the rotary (10), linear (10...
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WO/1998/041366A1 |
A driving motor to rotate a whole conveyor robot is reduced in size. The conveyor robot consists of first and second parallel link mechanisms (22a, 22b, 23a, 23b) in which driver side links (31a, 31b, 36a, 36b) and driven side links (32a...
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WO/1998/036876A1 |
Degradation of positional accuracy in a power transmission system of a motor unit and generation of vibrations due to torsional deformation or the like are eliminated. In a robot for handling, arms (7a, 7b) are secured outside each of a ...
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WO/1998/031514A1 |
A substrate transport apparatus (12) having a movable arm assembly (18), two substrate holders (22, 23) and a coaxial drive shaft assembly (20). In a first embodiment, the movable arm assembly (18) has a general x-shaped section (28) tha...
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WO/1998/016748A1 |
A pneumatic cylinder assembly (1) comprises an outer cylinder element (2), an inner cylinder element (3), which is telescopically displaceable in the axial direction (a) relative to the outer cylinder element, and a piston element (4), w...
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WO/1997/047440A1 |
A tilting elevator is set forth. A rigid frame (12) has a base (14), a structurally rigid structure (18) extending upwardly from the base (14), and a flange (22) attached to the structure top. The flange (22) is generally parallel to the...
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WO/1997/045233A1 |
Robotic apparatus (24) may be provided for handling workpieces such as semiconductor wafers (44) within an integrated vacuum processing system (20) and may be mounted within a vacuum load lock chamber (34) adjacent a plurality of vacuum ...
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WO/1997/039861A1 |
The invention relates to a method for the production of flat pneumatic and fluid micromanipulators in the prior art, micromanipulators are produced from three-dimensional components by a production process operating in three-dimensions. ...
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WO/1997/026039A1 |
A chemical (coating and reduction)/mechanical/electrical treatment of ion-exchange materials (preferably ion-exchange membranes) to convert them to artificial muscles. The figure is a perspective view of an actuator of the invention show...
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WO/1997/026117A1 |
A substrate processing apparatus (230) having a supply of substrates (234, 235), a substrate transport module (232), and a substrate processing module (236). The transport module (232) has a movable arm assembly and two substrate holders...
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WO/1997/021525A1 |
Apparatus for transferring an object between spaced locations comprises first and second articulated arms (56, 58) mounted on a support, each articulated arm having a drive member (60, 66) disposed for rotation about a drive axis (62) an...
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WO/1997/015423A1 |
A substrate transport apparatus (12) having a movable arm assembly (18), two substrate holders (22, 23) and a coaxial drive shaft assembly (20). The movable arm assembly (18) has a general X-shaped shaft assembly (20). The substrate hold...
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WO/1997/010078A1 |
A multi-stage telescoping tube structure (10) and a robot including a multi-stage telescoping tube structure (10). The multi-stage telescoping tube structure (10) includes an outer tube (16), an intermediate tube (18), and an inner tube ...
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WO/1997/005421A1 |
An adjustable hollow arm and joints therefor, one of the joints (7) being a universal joint, the other an angle joint. The universal joint comprises a hollow spherical member with generally opposite openings mounted in a holder to expose...
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WO/1996/039944A1 |
The invention is directed to manipulator assembly (2) for holding and manipulating a surgical instrument (14) in a telerobotic system. The manipulator assembly includes an instrument holder removably coupled to a drive assembly so that t...
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WO/1996/036462A1 |
An actuator (10) develops a displacement from a force; the actuator employs active tension elements (20) which comprise a fiber or fibers which shorten under activation, for example, shape memory alloy fibers; the fiber or fibers are ent...
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WO/1996/035877A1 |
The actuator of the invention consists of a plurality of supports (4) consisting in turn of a plate (2) and a shaft (3). Said plurality of supports (4) is fitted on a frame (1) and arranged to form a stack. In the axial direction of said...
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WO/1996/028271A1 |
In a gripping device (D) with gripping jaws or gripping fingers (A) for the handling of rod or bar shaped articles, such as reinforcement steel, wherein the gripping device is arranged at the end of a robot arm, the gripping device (D) w...
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WO/1996/024000A1 |
A telescopic tube (100) includes a moveable handle (116) which is attached to cables (118) for causing the tube portions (104, 106) to extend telescopically or retract. Various applications are disclosed for using the telescopic tube (100).
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