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JP2006179660A |
To provide a polarization measurement device which can measure the polarization state of light highly accurately without being practically affected by error regarding optical characteristics of a phase shifter and a polarizer.The polariz...
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JP3791975B2 |
To provide method and system for measuring the phase difference between two orthogonal polarized components of a test beam and the intensity of these components. A partial polarization beam splitter 101 splits a polarized test beam 103 i...
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JP2006153503A |
To provide a birefrigence measuring device capable of acquiring a highly accurate measurement result, even if an inexpensive phase plate is used, without using a high-accuracy quarter wave plate, and to provide a stress distribution meas...
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JP3782673B2 |
To provide a film thickness measuring instrument which can easily and securely manage a beam spot diameter and perform the management corresponding to user specifications and a sample for beam spot diameter management used for the method...
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JP3782481B2 |
PURPOSE: To improve measuring accuracy and also enable measurement of polarization analyzing parameter of a sample as function of excitation frequency by exciting a sample by optical beam from an external optical system and phase modulat...
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JP2006078494A |
To measure polarization angle rotation for measuring electron density of a tokamak device, and to stably measure the electron density of the tokamak device with high reliability.A light source for generating a single wavelength of light ...
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JP2006071458A |
To provide a measuring device and a measuring method capable of measuring a phase difference immediately only by setting a sample without a rotation mechanism.This double refraction phase difference measuring device is equipped with a li...
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JP2006058299A |
To provide an improved determining method for the behavior of polarization of an optical device under test.The polarization dependent characteristic JDUT of the optical device 2 under test is determined. A response signal R is received f...
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JP2006058055A |
To provide a birefringence measurement device that is easily manufactured and capable of high accuracy measurements, while having an inexpensive and simple structure.This birefringence measuring device 100 for measuring a birefringence c...
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JP3747471B2 |
The detection light of polarization bearing is synchronized with slit light scanning so as to two-dimensionally record the polarization bearing using a pair of analyzers (5,6) and storage type image detectors (7,8) that are in crossed Ni...
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JP2006505791A |
A method for screening fiber polarization mode dispersion using a polarization optical time domain reflectometer. A pulse radiation is emitted into the fiber under test, and the backscattered radiation is measured by the POTDR and used t...
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JP2006042234A |
To present an OSNR measuring method and apparatus capable of measuring an optical signal noise ratio (OSNR).An optical band pass filter (OBPF) 20 extracts a waveform of a target to be measured or a signal light component of a channel. A ...
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JP3734667B2 |
To measure a smaller PMD value with a simple formation by a fixed analyzer method. Polarization mode dispersion larger than the polarization mode dispersion of a measuring object 1 is given by a reference object 23 to linear polarized li...
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JP3731306B2 |
To provide an apparatus which can economically and easily be assembled and inspects optical axis of a phase difference plate at high precision. A first standard polarization plate 2 whose optical axis 4 is paralleled to a standard line 6...
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JP2005345391A |
To provide a semiconductor device capable of directly and accurately converting a difference of circularly polarized light states into a current or a voltage (a physical value), and a circularly polarized light detector composed by using...
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JP2005535897A |
A method for calibrating parameters of sensor elements in a sensor array. The method comprises receiving an output signal of at least two sensor elements signal in reaction to an input signal from a signal source; estimating a cross-corr...
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JP2005321328A |
To provide a small-sized polarization state measuring instrument capable of measuring precisely a polarizing state of an input signal light, by correcting differences in arrival times of the signal light up to photoreception elements cau...
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JP3716305B2 |
To provide an internal reflection type two-dimensional imaging ellipsometer capable of measuring a thickness and an optical characteristic of a material with a two dimension. The ellipsometer includes a prism 49, an incident optical syst...
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JPWO2004008196A1 |
A thin polarizing element array and a wave plate array composed of minute regions having different optical axis directions or wavelength characteristics are realized with a high extinction ratio and insertion loss, and an ellipsometry ap...
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JP2005308612A |
To provide a small-sized, quick and precise ellipsometer and spectroscopic ellipsometer without a driving part in a conventional ellipsometer.This "rotary analyzer type" ellipsometer is constituted by combining one sheet of polarizer arr...
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JP2005308607A |
To provide a spectroscopic ellipsometer capable of suppressing the adverse effect of primary or above diffracted light to the utmost to certainly take out a desired signal based on zero-order diffracted light.In the spectroscopic ellipso...
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JP2005292020A |
To enable measurement of Stokes parameters and a DOP at a low cost in a short time.The polarization measuring device 10a varies a refractive index of LiNbO3, by control of voltages applied to electrodes 9a-9c or electrodes 22a-22d, and t...
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JP2005283564A |
To allow easy operation, to simplify a structure, and to provide test work at low cost.This test device has at least one light source 41, and at least one polarization device 43. In the test device, a beam 40 is emitted from the light so...
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JP2005530152A |
The invention concerns an achromatic spectroscopic ellipsometer for analysing small regions of a sample (1) over a wide range of wavelengths from ultraviolet (UV) to infrared (IR). The spectroscopic ellipsometer contains a light source (...
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JP2005257508A |
To provide a double refraction measuring device and a double refraction measuring method capable of evaluating accurately a measuring object without disturbing conveyance in the middle of continuous conveyance of the measuring object.Thi...
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JP2005258396A |
To perform the grading of a polarizing plate mainly based on a numerical value acquired by dividing the color saturation difference value of net obtained by subtracting the color saturation difference value of the initial state of the po...
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JP3697279B2 |
PURPOSE: To measure measurement points over the whole substrate to be measured, at high speed. CONSTITUTION: This device comprises a light emission unit 50, light reception unit 38, and a light deflection unit 54. The unit 50 supplies an...
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JP3694738B2 |
To provide a layered thin film device of oriented conjugate polymers and titanium oxide which can detect signals of polarized modulated light and can demodulate the signals and to provide a polarization detection circuit by using the abo...
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JP2005241406A |
To specify wavelength dependency of a double refraction phase difference caused by double refraction dispersion and a principal axis direction under the double refraction dispersion, in a short time.A phase shifter 4 has two 1/4-waveleng...
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JP3688615B2 |
To provide a field detecting optical device used in a transceiver for a wearable computer without a wire, not radio-transmitting and basically independent of earth ground, and used for precisely performing data communication by an electr...
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JP3689681B2 |
To provide an apparatus for detecting a polarized state of a luminous flux, especially a Stokes meter for finding a Stokes parameter. At least one luminous-flux division means used to divide the luminous flux maintaining the polarized st...
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JP2005227019A |
To provide a measuring method and measuring instrument for a polarization axis to simply find an absolute angle between the polarization axis of a polarization element and a preset reference axis.A polarization element under measurement ...
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JP3679774B2 |
To provide a birefringence measuring apparatus by which a birefringence amount with respect to an F2 laser beam of a measuring object (e.g. fluorite) is measured in an environment close to an ordinary environment without using the F2 las...
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JP3677314B2 |
PURPOSE: To lead out two phase-shifted signals for formation of a physical quantity from a common optical channel by inverting an input beam of light in an electro-optic crystal, passing the beam through a beam splitter for splitting, an...
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JP2005189245A |
To accurately and easily measure a solution concentration, even when a sample is contaminated, even when a tested solution is suspended, and even when a disturbance factor such as a suspended particle exists, in measurement of a specifie...
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JP2005520132A |
The invention concerns a polarimetric system and a method of polarimetric measurement of the Mueller matrix coefficients of a sample (7). The polarimetric system contains an excitation section (1) emitting a light beam (2). Said light be...
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JP2005140585A |
To provide a small polarization state measuring device capable of precisely measuring polarizing state of input signal light, even if it is an optical system in which a plurality of light-receiving elements are arranged closely.The polar...
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JP2005098710A |
To solve the problem wherein, though a method for allowing light to enter a sample and determining the concentration from its angle of rotation is useful as a method for measuring the concentration of a rotatory material in the sample an...
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JP2005509153A |
Provided are systems and methods using a Soleil-Babinet compensator (101) as a standard for calibrating birefringence measurement systems. Highly precise and repeatable calibration is accomplished by the method described here because, am...
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JP2005085904A |
To solve the problem wherein a plurality of etalon filters are required and the number of adjustment working hours is increased, to detect a minute change in an LD output wavelength in a wide wavelength range, since characteristics in th...
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JP2005062865A |
To provide a general technique for improving the PER of a birefringent material which is limited by spatial unevenness of a birefringent characteristic of the birefringent material.A method for improving the polarization extinction ratio...
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JP2005055391A |
To provide technology to evaluate characteristics of the retardation plate quantitatively and easily.The program for evaluation of characteristics of retardation plate is performed as follows: a 1st step (S100) for acquisition of phase d...
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JP2005043353A |
To provide a device that has a detector section having a polarization detection means for detecting the emission polarization state of radiation emitted from an optical system and investigates the optical system in polarization proper fa...
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JP2005504314A |
In a measurement arrangement comprising an optical device, into which a diverging beam coming from a specimen is coupled for measurement, and further comprising a detector, which is arranged following said optical device and comprises a ...
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JP3613707B2 |
To provide a measuring method using a spectral ellipsometer by a minimal value calculation method (BLMC), for determining precisely and accurately wavelength dependency of an ultrathin film, a thin film structure and a permittivity. This...
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JP2005502266A |
The degree of polarization of an optical signal is measured by a polarimeter and used for providing a feedback signal to adjust adaptive optics of a polarization mode dispersion compensator. The polarization properties of the polarimeter...
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JP2005009941A |
To provide a library preparing method used in cross-section shape measurement for measuring, with high throughput and high accuracy, the cross-section shape of a pattern of a structure having a cyclic recess-and-projection shape (such as...
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JP3608350B2 |
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JP2005005521A |
To provide an aligner capable of determining the appropriate polarization state of illuminating light to a mask and obtaining a desired polarization state with appropriate optical adjustment as required.The aligner having illuminating sy...
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JP2005003666A |
To provide a spectroscopic ellipsometer which has high accuracy of measurement.An illumination part 3 of the spectroscopic ellipsometer 1 has a measuring light source 31. A polarized light, which is obtained by a polarizer 32 from a ligh...
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