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WO/2002/091534A1 |
An optical signal emitted from a semiconductor laser (1) is focused by a lens (2) and is then received by a single uniaxial double refraction crystal (3). This uniaxial double refraction crystal (3) has a C-axis inclined by 90 degrees wi...
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WO/2002/077680A1 |
Disclosed is an apparatus and method for measuring a changing amount of insertion loss of an optical device depending on a polarization state of an incident light, i.e., a polarization-dependent loss. An incident light that is periodical...
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WO2001007881A9 |
The parallel detecting spectroscopic ellipsometer/polarimeter sensor (10) has no moving parts and operates in real-time for in-situ monitoring of the thin film surface properties of a sample (22) within a processing chamber. It includes ...
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WO/2002/056083A1 |
The invention relates to optical engineering, in particular to methods for measuring a microrelief, the distribution of optical material constants of a near-surface layer and can be used for microelectronic engineering, nanotechnology, m...
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WO/2002/054028A2 |
Apparatus (1200, 1300) and accompanying methods to visualize and calculate, by direct visual measurement and interpolation, polarized light, in the form of sphere (observable polarization sphere - OPS) along with its associated spherical...
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WO/2002/050501A1 |
The invention relates in general to systems dor finding profiles of topographical features of small dimensions, such as those of a silicon substrate (12), and in particular to such systems using optical spectrometer (60).
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WO/2002/046723A1 |
The present invention relates to an apparatus and a method for detecting an amount of depolarization of a linearly polarized beam transmitted by a birefringent medium in the direction of the optical axis thereof. The apparatus comprises ...
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WO2000065331A9 |
Two phase modulators or polarizing elements are employed to modulate the polarization of an interrogating radiation beam before and after the beam has been modified by a sample to be measured. The detected signal may be used to derive el...
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WO/2002/040953A1 |
The invention relates to a method and apparatus for determining the polarization properties of light emitted, reflected or transmitted by a material (5) using a laser scanning microscope with the tested material (5) being illuminated poi...
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WO/2002/038048A1 |
A concentration measuring instrument for measuring the concentration of an optically active substance in a solution without contacting with the solution comprises a light source for outputting linearly polarized light, a light intensity ...
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WO/2002/029374A1 |
Devices and methods for differential numerical aperture analysis of samples, utilizing angle-of-incidence measurements resulting from variable illumination (30) or observation (40) numerical apertures, or both. Metrology applications are...
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WO/2002/025235A1 |
An apparatus for use in the analysis of optically-active materials comprising a radiation source, container means for a sample of material under examination through which radiation from the source passes to a detector, polariser means di...
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WO/2002/019016A1 |
The invention is an instrument for sensing the state of polarization (SOP), and for transforming the SOP of a beam of light from an incident continuously-varying arbitrary SOP to a desired exit SOP, using a polarization compensator (71) ...
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WO/2002/006780A1 |
The invention concerns an ellipsometer comprising a source (S) supplying at least an infrared radiation, a sample-holder (PE), a sensor (D), a first optical system mounted between the source (S) and the sample-holder (PE), so as to illum...
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WO/2002/006779A2 |
The invention concerns an ellipsometer comprising: a source (2) capable of emitting a broadband ray (4), a polarizer (10) for producing a polarised incident beam (12) adapted to illuminate a sample (16) according to at least a selected a...
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WO/2001/094898A1 |
The invention concerns a spectroscopic ellipsometer comprising a light source (1) emitting an optical beam, a polarizer (2) arranged on the path of the optical beam emitted by the light source, a sample holder (9) receiving the optical b...
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WO/2001/088504A1 |
The inventive method for measuring a concentration of optically active substances in solutions with the aid of the faraday rotation angle consists in transmitting modulated plane polarized radiation through an under study solution, and i...
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WO/2001/081949A2 |
Plural electronic or optical images are provided in a streak optical system, as for instance by use of plural slits instead of the conventional single slit, to obtain a third, fourth, etc. dimension - rather than only the conventional tw...
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WO2000047961A9 |
A polarized sample beam (12) of broadband radiation is focused onto the surface of a sample (3) and the radiation modified by the sample is collected by means of a mirror system (16) in different planes of incidence. The sample beam focu...
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WO/2001/073385A1 |
A system and method for precisely measuring low-level and circular birefringence properties (retardance and direction) of optical materials (26). The system incorporates a photoelastic modulator (24) for modulating polarized light that i...
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WO/2001/069196A1 |
In order for a simple configuration based on a fixed analyzer method to measure smaller PMD values, a reference substance gives a specified polarization mode dispersion to a linearly polarized light extracted by a first polarizer from a ...
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WO/2001/065221A1 |
A photodetector device comprising a photosensitive detector (12; 22) and one or more interfaces (20', 20', 28, 98) between dissimilar media is configured so that a light beam (LB) for detection will pass through the interface(s) along a ...
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WO/2001/063231A1 |
A circular dichroism spectrometer eliminates linear birefringent interference by having a first polarization modulator (8) before the sample (10) and a second polarization modulator (46) after the sample (10). The two polarization modula...
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WO/2001/053786A1 |
An improved ellipsometry method and a self-correcting simultaneous multiple angle/multiple wavelength return path ellipsometer (20) are disclosed which allow for simultaneous measurement at multiple angles of incidence in a manner which ...
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WO/2001/051901A1 |
A dynamic self calibration process (130) periodically calibrates a system for precisely measuring low-level birefringence properties (retardance and fast axis orientation) of optical materials. Variations in birefringence measurements ca...
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WO/2001/050100A2 |
An optical spectrum analyzer comprises a diffraction grating (DG), a polarization decomposing unit (PDM) for decomposing the input light beam into first and second light beams having mutually-perpendicular linear states of polarization, ...
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WO/2001/048450A1 |
A photoelectric module (1) comprises an electrically non-conducting support (2) and a photoelectric element including an array of spatially distributed photoelectric members applied to a surface of the support (2). High simplicity and ef...
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WO/2001/042750A1 |
An apparatus for making automated measurements of an optical property of a sample includes a first stage (36) which is movable along a predetermined line, a second stage (50) for holding the sample, as a third stage which is movable alon...
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WO/2001/042749A1 |
An apparatus and method for detecting the state of polarization (SOP). The apparatus of the present invention includes a phase retarder and a polarizer which rotate with different speeds. In the method of the present invention, optical s...
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WO/2001/020254A1 |
This invention relates to ellipsometry and reflectometry optical metrology tools that are used to evaluate semiconductor wafers, and is directed to reducing errors associated with material surrounding a desired measurement area or pad. O...
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WO/2001/013079A1 |
The invention provides method and apparatus for the resolution of beams of electromagnetic radiation. In one aspect, there is provided a method for resolving overlapping emission spectra, involving: providing a plurality of polarised inc...
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WO/2000/068656A1 |
The surface of a doped semiconductor wafer (12) is heated locally by means (14) of a pump beam whose intensity is modulated at a first frequency (18). The heated area (12a) is sampled by a probe beam (42) whose intensity is modulated at ...
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WO/2000/058699A1 |
A diagnostic system (24) for a PEM (20) provides optically determined information about the retardance characteristics induced by the PEM (20). The diagnostic system (24) is integrated with the PEM (20) so that the PEM (20) performance m...
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WO/2000/046579A1 |
The invention relates to measuring methods and especially to optical biosensors. The invention can be used for determining the effectiveness of different antibiotics in relation to different pathogenic micro-organisms or for monitoring w...
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WO/2000/040978A1 |
A glass fiber sensor (3) for measuring an electrical current, the glass fiber core being a heavy flint glass having its composition modified by the addition to the glass composition of a source of a selected rare earth ion, whereby the V...
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WO/2000/039546A1 |
The present invention relates to a polarimetric device for the remote measurement of the optical and physical parameters of objects. This device includes a first and a second linear polarisers (1, 2) which are rigidly mounted together wi...
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WO/2000/022416A1 |
The invention concerns an apparatus for optically characterising a thin-layer material by backscattering Raman spectometry comprising a frame, a monochromatic excitation laser source (21), optical means (23, 24) directing a light flux em...
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WO/2000/019518A1 |
A method for improving the measurement of semiconductor wafers is disclosed. In the past, the repeatability of measurements was adversely affected due to the unpredictable growth of a layer of contamination over the intentionally deposit...
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WO/2000/003228A1 |
A spectral ellipsometer that enables complete simultaneous measurement of ellipsometric parameters of a surface (18) with thin films and coatings for the full wavelength range of interest by using an imaging spectrograph (24) together wi...
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WO/1999/066286A1 |
The invention concerns a method for controlling the production of an object controlled by a gas panel, which consists in performing an ellipsometric measurement on the object represented by its Mueller matrix; controlling, by means of a ...
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WO/1999/066309A1 |
The invention relates to a method and a device for accurate determination of the oscillation plane of polarised light. According to said method, the light of a light source (1) is polarised by means of a polarisation filter (2) having an...
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WO/1999/056237A1 |
The invention relates to a method for imaging hand and/or finger lines with a camera which functions without contacting the skin with the recording device. By using linear or circular polarized light in the illuminating and imaging beam ...
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WO/1999/053296A1 |
A method for miniaturizing a polarimeter with a very long optical path length for analyzing low concentrated components in particular in a fluid measuring product on an optical basis, whereby the optical measuring beam is guided several ...
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WO/1999/051955A1 |
Achromatic optics may be employed in spectroscopic measurement systems. The achromatic optics comprises a spherical mirror (30) receiving a beam of radiation in a direction away from its axis and a pair of lenses (22, 24): a positive len...
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WO/1999/042796A1 |
A practical system and method for precisely measuring low-level birefrigence properties (retardance and fast axis orientation) of optical materials (26). The system permits multiple measurements to be taken across the area of a sample to...
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WO/1999/040399A1 |
The invention concerns a polarimeter (31) and a method for measuring a light beam polarisation states. Said polarimeter comprises a prism (32) for separating the incident light beam (21) having a Stokes vector (S) into a reflected beam (...
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WO/1999/037980A1 |
A video imaging device includes a light source (2), a detector (36), and an optical polarization system (6, 38) for video imaging of superfical biological tissue layers (26, 32). The device relies on taking a set of measurements at diffe...
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WO/1999/030119A1 |
An apparatus uses reflectance spectrophotometry to characterize a sample (16) having any number of thin films. The apparatus uses two toroidal mirrors (33, 34) in an optical relay to direct light reflected by the sample (16) to a spectro...
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WO/1999/024850A1 |
The invention relates to an optoelectronic device (1) for detecting objects (2) in a monitoring area. A transmitter (3) which emits a transmitting light beam (8) and two receivers (4, 5) which receive a receiving light beam (10) are arra...
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WO/1999/008068A1 |
The invention relates to an ellipsometer measuring instrument for determining the thickness of a film deposited on a substrate. Said ellipsometer comprises: a light source (3) which emits an entrance ray (9); a transmitting optical syste...
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