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WO/2001/082475A2 |
Several MEMS-based architectures which utilize vibrating micromechanical resonators in circuits to implement filtering, mixing, frequency reference and amplifying functions are provided. A method and apparatus are provided for upconverti...
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WO/2001/082477A2 |
Several MEMS-based methods and architectures which utilize vibrating micromechanical resonators in circuits to implement filtering, mixing, frequency reference and amplifying functions are provided. Apparatus is provided for filtering si...
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WO/2001/082323A1 |
A silicon substrate (21) has fixed contacts (23A, 24A) on its upper surface. Signal lines (23, 24) connected electrically with the fixed contacts (23A, 24A) pass through the silicon substrate (21) from the front to the back. Bumps (32, 3...
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WO/2001/082479A2 |
Several MEMS-based methods and architectures which utilize vibrating micromechanical resonators in circuits to implement filtering, mixing, frequency reference and amplifying functions are provided. Apparatus is provided for selecting at...
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WO/2001/082478A2 |
Several MEMS-based methods and architectures which utilize vibrating micromechanical resonators in circuits to implement filtering, mixing, frequency reference and amplifying functions are provided. A method and subsystem are provided fo...
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WO/2001/080266A1 |
The invention relates to a controlling of micromechanical elements. Especially the invention relates to the controlling of the micromechanical switches. According to a method for controlling at least one micromechanical element a first c...
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WO/2001/080258A2 |
This invention relates to the area of microelectromechanical systems and micro relays and micro switches. The relays disclosed allow high currents, inductive loads, and high frequencies to be controlled using a relay that increases its r...
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WO/2001/073891A1 |
A tunable impedance surface for steering and/or focusing a radio frequency beam. The tunable surface comprises a ground plane; a plurality of elements disposed a distance from the ground plane, the distance being less than a wavelength o...
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WO/2001/073893A1 |
A tuneable impedance surface for steering and/or focusing a radio frequency beam. The tunablesurface comprises a ground plane; a first plurality of elements disposed in an array a firstdistance from the ground plane, the distance being l...
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WO/2001/067476A1 |
Apparatus and methods for protecting devices such as micro-switches (100) and micro-relays from adverse effects of electrostatic discharge (ESD). A protection device is provided that includes a two terminal switch (102, 104) that can be ...
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WO/2001/063634A2 |
The invention relates to a microswitch with a substrate (1) and a spring (2). The spring (2) consists of an intrinsically biased material. Therefore, deposition of an additional layer producing the curvature of the spring (2) can be disp...
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WO/2001/057900A1 |
A MEM relay (110') includes an actuator, a shorting bar (52) disposed on the actuator, a contact substrate, and a plurality of liquid metal contacts (126, 128) are disposed on the contact substrate such that the plurality of liquid metal...
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WO/2001/056920A2 |
A Micro-Electromechanical Systems (MEMS) device (100) having conductively filled vias (141). A MEMS component (124) is formed on a substrate (110). The substrate has conductively filled vias (140) extending therethrough. The MEMS compone...
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WO/2001/057902A2 |
A method and apparatus are described that may be used to provide decoupled rotation of structures about different pivot points. The apparatus may include one or more fixed blades mounted to a frame or substrate, one or more movable blade...
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WO/2001/057901A1 |
The invention relates to a microrelay that comprises a switch element (9) suspended on a substrate (1) so as to be pivotable. Said switch element can be displaced, like a rocker, between two alternative switch modes by electrostatic attr...
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WO/2001/045127A1 |
A MEMS (Micro Electro Mechanical System) electrostatically operated high voltage variable controlled capacitor device is provided. The MEMS device comprises a microelectronic substrate (10), a substrate signal electrode (30), and one or ...
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WO/2001/045120A2 |
A variable capacitor having low loss and a correspondingly high Q is provided. In addition to a substrate, the variable capacitor includes at least one substrate electrode and a substrate capacitor plate that are disposed upon the substr...
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WO/2001/043153A1 |
A method of manufacturing an electronic device comprising an integrated circuit device having micromechanical switches (10) and thin film circuit components (20) provided on a common substrate (2). The micromechanical switches (10) have ...
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WO/2001/037303A1 |
A micro machine switch comprises at least two distributed-constant lines (21a, 21b) adjacent to one another; a movable member (11) opposed to and above the corresponding distributed-constant lines and adapted to allow high-frequency conn...
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WO/2001/035433A2 |
A microelectromechanical (MEM) switch is fabricated inexpensively by using processing steps which are standard for fabricating multiple metal layer integrated circuits, such as CMOS. The exact steps may be adjusted to be compatible with ...
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WO/2001/031664A1 |
An optically controlled micro-electromechanical (MEM) switch is described which desirablyutilizes photoconductive properties of a semiconductive substrate upon which MEM switches arefabricated. In one embodiment the bias voltage provided...
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WO/2001/024307A1 |
The phase shifter carries out on/off control of a micromachine switch to switch pass phases of high-frequency signals. The micromachine switch includes one end fixed to second distributed-constant circuits (3a, 3b) and the other end havi...
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WO/2001/015184A1 |
A microelectromechanical (MEMS) device (10) is provided that includes a microelectronic substrate (40), a microactuator (20) disposed on the substrate (40) and formed of a single crystalline material, and at least one metallic structure ...
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WO/2001/013457A1 |
An electrical switch (40) comprises: electrical contacts (18, 20, 24) and an actuator (26) for moving the contacts relative to each other between an open state and a closed state. The actuator (26) includes a deformable member (14), pref...
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WO/2001/009911A1 |
The invention relates to a relay, especially a miniaturized electrostatic relay, with a bridge-forming contact. The contact spring is configured as a torsion spring that is linked with a control spring (3) via repeatedly bent spring elem...
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WO/2001/003152A1 |
A MEMS (Micro Electro Mechanical System) electrostatically operated device is provided that can switch high voltages whiles providing improved arcing tolerance. The MEMS device comprises a microelectronic substrate, a substrate electrode...
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WO/2001/003288A1 |
Power amplifiers having reactive networks (such as classes C, C-E, E and F) employ tunable reactive devices (C¿shunt?, C¿series?, L¿series?) in their reactive networks, with the reactive devices respective reactance values capable of ...
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WO/2001/001434A1 |
A MEMS (Micro Electro Mechanical System) electrostatically operated high voltage switch or relay device is provided. This device can switch high voltages while using relatively low electrostatic operating voltages. The MEMS device compri...
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WO/2000/073839A1 |
A MEMS (Micro Electro Mechanical System) electrostatic device operated with lower and more predictable operating voltages is provided. An electrostatic actuator, an electrostatic attenuator of electromagnetic radiation, and a method for ...
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WO/2000/065626A1 |
A micromachine switch for use in millimeter wave and microwave circuits, which has a simplified structure compared with the conventional one. The micromachine switch comprises first and second high-frequency signal lines (1b, 1a); a cant...
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WO/2000/060627A1 |
There are provided drive means for displacing a contact (11) according to a control signal (12), a first control signal line for passing a control signal to the drive means (4), and first signal blocking means (3) connected with the firs...
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WO/2000/057445A1 |
The invention relates to a novel microrelay for switching electrical currents, wherein a movable contact piece (1) moves parallel to the substrate.
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WO/2000/055918A1 |
A memory element for a flash memory comprises a cantilever element (8) made from electrically conductive material and having a stable position, an electrically conductive floating gate (6) for storing charge, and means (10) for urging th...
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WO/2000/052722A1 |
A single pole, double throw micro-electromechanical (MEM) switch. The inventive switch includes a first contact providing a first terminal of the switch. A second contact provides a second terminal of said switch. A cantilever beam provi...
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WO2000024021A9 |
A micromechanical switch (100) includes a substrate (150), a gate electrode (130), a source electrode (120), a drain electrode (140), and various style beams (110). For example, a beam (110) may be relatively long and includes flexures (...
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WO/2000/046852A1 |
A microstructure relay comprising an s-shaped support member is provided. The s-shape support member creates over-travel in the relay in order to produce high contact force and low contact resistance over the lifetime of the relay. Compr...
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WO/2000/044012A1 |
The invention relates to a mechanically closing, electric microswitching contact (1) comprising two electrically conductive contact elements (7, 8) whose respective contact surfaces come into contact with one another. According to the in...
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WO/2000/042705A1 |
A flexural-mode, micromechanical resonator utilizing a non-intrusive support structure to achieve measured Q's as high as 8,400 at VHF frequencies from 30-90 MHz is manufactured using polysilicon surface micromachining technology. Also, ...
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WO/2000/041200A1 |
A control line (16a) and a control terminal (3a) are arranged farther than the position of an electrode (11) from a signal line (2a). This arrangement reduces the loss of energy in the signal line actuated by a micromachine switch.
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WO/2000/039915A1 |
An electrostatic actuator and drive configuration device for use in a system requiring a long term ON state operation. The device includes a first electrostatic actuator positioned to operate in the system requiring the long term ON stat...
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WO/2000/038208A1 |
A micromachine which can be mass-produced, is cheap, and has high performance. The machine comprises a support member (7) provided near a gap of a signal line on a base (1) and has a predetermined height from the surface of the base (1),...
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WO/2000/038209A1 |
A micromachine switch comprises a support member having a predetermined height from the surface of a base, a flexible cantilevered arm projecting from the support member parallel to the surface of the base and facing the gap between two ...
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WO/2000/030543A1 |
The use of any micro-mechanical component in an ultrasound system is disclosed. In particular, the use of micro-relays (9), micro-switches (9), and an inductor in the transducer probe head, in the transducer connectors or anywhere else i...
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WO/2000/031819A1 |
A switch includes a conductive region, a membrane, and a dielectric region. The dielectric region is formed from a dielectric material and is disposed between the membrane and the conductive region. When a sufficient voltage is applied b...
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WO/2000/031767A1 |
The inventive micromechanical electrostatic relay has at least one base substrate (1) with a flat base electrode, and an armature tongue (21) that has been relieved from an armature substrate (2), with a flat armature electrode. A wedge-...
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WO/2000/026933A1 |
A micro machine switch comprises at least two distributed-constant lines (2a, 2b) adjacent to one another; a movable member (11) opposed to and above the corresponding distributed-constant lines and adapted to allow high-frequency connec...
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WO/2000/025337A1 |
The invention relates to a micromechanical relay for switching high-frequency signals. Said relay comprises a ground electrode arranged on a substrate, a movable counter-electrode with an electrically conductive contact bridge and two co...
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WO1999063562B1 |
A micro-electromechanical switch (100) comprises a flexible longitudinal beam (111) disposed adjacent to first and second contact members (106, 109) which form a gap in, for example, a radio frequency transmission line to control the flo...
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WO/1999/065107A1 |
A phased-array antenna has a multilayered structure, which comprises a radiation layer (41) including a plurality of radiating elements (1) and a phase control layer including a plurality of phase shifters (2) for controlling the phases ...
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WO/1999/063559A1 |
A micro-mechanical element (1) comprises a discrete switching element (6) and switching means (2a, 2b) for applying force to the switching element (6) to move the switching element (6) between two stable positions.
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