Title:
【発明の名称】偏光変調用の光学構成部材、この光学構成部材を備えるミュラー偏光計および偏光解析装置、この偏光解析装置の較正方法ならびに偏光解析方法
Document Type and Number:
Japanese Patent JP2000502461
Kind Code:
A
Abstract:
An optical component for modulation of polarization, a Mueller polarimeter and ellipsometer containing such an optical component. The optical component modulates a linearly polarized incident beam and returns a modulated beam. It includes a coupled phase modulator which modulates the incident beam twice in succession, the two modulations having the same frequency of omega/2pi, and a coupling system modifying the polarization state of the light between the two modulations. The ellipsometer includes the means for detection of a measurement beam returned by a sample, which receives the modulated beam, in addition to a processing unit. The means of detection include a polarimeter producing n measured quantities representing the polarization states of the beam, and the processing unit produces m values for each of these quantities by Fourier transform, with nxm>=16 and m>=4, providing simultaneous access to the sixteen components of the Mueller matrix of the sample.
Inventors:
Drevillon Bernard
Compan eric
Compan eric
Application Number:
JP52010098A
Publication Date:
February 29, 2000
Filing Date:
October 16, 1997
Export Citation:
Assignee:
Santor Nasional Dural Shell Chessy Yantifik
International Classes:
G01J4/00; G01J4/04; G01N21/21; G02F1/03; (IPC1-7): G01J4/04
Attorney, Agent or Firm:
Masahiko Takeda (2 outside)