Title:
【発明の名称】第一群気体用絞りサイクル・クライオポンプ・システム
Document Type and Number:
Japanese Patent JP2000506584
Kind Code:
A
Abstract:
A Group I gas cryopumping system includes a compressor throttle cycle refrigerator using mixed refrigerants. Cold refrigerant flows through a cryopumping surface located in a vacuum chamber, whereon vapor freezes. The refrigerant then passes through a heat exchanger in cross flow with refrigerant from the compressor. Refrigerant flow entering and leaving the heat exchanger is in uninsulated lines at substantially room temperature. All exposed cold lines are eliminated. The throttle device and cold cryopumping surface are an integral unit that connects directly to the flow paths of the heat exchanger without intermediate lines. The compressor/aftercooler unit may be located at any convenient distance from the heat exchanger and cryopumping surface, and the heat exchanger is located immediately adjacent to the pumping surface in a separate housing outside the vacuum chamber. The heat exchanger housing may share or be isolated from the vacuum of the vacuum chamber. Selected mixed refrigerants provide a wide range of cooling capacity over narrow, selectable temperature ranges. Thus, in a selected temperature range, gases are selectively collected to the exclusion of other gases. A tray collects liquid water from the cryopump surfaces during defrost.
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Inventors:
Long Swath, Ralph, Sea.
Lots, Francis, Tee.
Lots, Francis, Tee.
Application Number:
JP53272797A
Publication Date:
May 30, 2000
Filing Date:
March 12, 1997
Export Citation:
Assignee:
AP Cryogenics, Inc.
International Classes:
B01D8/00; F04B37/08; F25B9/00; (IPC1-7): F04B37/08; B01D8/00
Attorney, Agent or Firm:
Asao Kamoda (1 person outside)