Title:
【発明の名称】酸化マグネシウムスパッタリング装置
Document Type and Number:
Japanese Patent JP2001516398
Kind Code:
A
Inventors:
Chapin, Jiang, S
Eliato, Stephen, M
O'Keeffe, Patrick, El
Eliato, Stephen, M
O'Keeffe, Patrick, El
Application Number:
JP53993198A
Publication Date:
September 25, 2001
Filing Date:
March 17, 1998
Export Citation:
Assignee:
Applied, Films, Corp.
International Classes:
C23C14/00; C23C14/08; C23C14/22; C23C14/35; H01J37/34; (IPC1-7): C23C14/35; H01J37/34
Attorney, Agent or Firm:
Sanada Yuzo (2 outside)