Title:
【発明の名称】大容量ガス貯蔵および供給システム
Document Type and Number:
Japanese Patent JP2002502482
Kind Code:
A
Abstract:
A system for the storage and on-demand dispensing of a fluid that is sorbable on a physical sorbent and that subsequent to sorption is desorbable from the sorbent by pressure-mediated desorption and/or thermally-mediated desorption. The system includes a storage and dispensing vessel containing the physical sorbent, and a desorbed gas retention structure, e.g., a storage vessel, or an extended length of gas flow conduit, for holding fluid that is desorbed from the physical sorbent and flowed to the retention structure for subsequent discharge. A pump is operatively coupled in gas flow communication with the storage and dispensing vessel, and selectively operable to effect desorption of fluid in the storage and dispensing vessel, and transfer of desorbed fluid to the retention structure for holding therein. An actuating assembly monitors the pressure of fluid held in the retention structure and responsively thereto controls the pump, to maintain a predetermined pressure range and amount of fluid in the retention structure for subsequent discharge therefrom.
Inventors:
Tom M. Glenn M
Application Number:
JP55058498A
Publication Date:
January 22, 2002
Filing Date:
May 20, 1998
Export Citation:
Assignee:
ADVANCED TECHNOLOGY MATERIALS, INC.
International Classes:
B01D53/04; F17C7/00; F17C11/00; H01L21/265; H05H1/42; (IPC1-7): F17C11/00; F17C7/00; H01L21/265
Attorney, Agent or Firm:
Fukami Hisaro (5 others)