Title:
【発明の名称】ダイヤモンド状炭素でエッジをコーティングする方法
Document Type and Number:
Japanese Patent JP2002505716
Kind Code:
A
Abstract:
A method of creating a diamond-like carbon film on a substrate, including the steps of exposing the substrate to a hydrocarbon gas environment and generating plasma in the environment of an electron density greater than approximately 5x1010 per cm3 and a sheath thickness less than about 2 mm under conditions of high ion flux and controlled, low energy ion bombardment.
Inventors:
Jeffrey A. Hopwood
David Elle Pappas
David Elle Pappas
Application Number:
JP50460299A
Publication Date:
February 19, 2002
Filing Date:
June 11, 1998
Export Citation:
Assignee:
Northeastern, University
International Classes:
B26B21/60; C23C16/26; C23C16/27; B43K1/00; (IPC1-7): C23C16/27; B26B21/60; B43K1/00
Attorney, Agent or Firm:
Kazuo Sato (3 others)