Title:
【発明の名称】薄膜圧電振動子
Document Type and Number:
Japanese Patent JP2002515667
Kind Code:
A
Abstract:
The layer of the cover electrode, or an additional layer on the cover electrode is formed with holes, preferably produced lithographically, or similar structures. The structures have a mean spacing from one another which is smaller than the wavelength for operating the component. The structures are preferably distributed with a uniformity sufficient to effect a uniform change in the mass of the layer per area, thus producing a specific setting of the resonant frequency/ frequencies, and are preferably, on the other hand, distributed so irregularly that diffraction effects are avoided.
Inventors:
Robert Aigner
Application Number:
JP2000548952A
Publication Date:
May 28, 2002
Filing Date:
May 07, 1999
Export Citation:
Assignee:
Infineon Technologies Actien Gezel Shaft
International Classes:
H03H3/04; H03H9/00; H03H9/02; H03H9/17; (IPC1-7): H03H9/17; H03H9/02
Attorney, Agent or Firm:
Toshio Yano (4 outside)