Title:
【発明の名称】準安定原子衝撃源
Document Type and Number:
Japanese Patent JP2002517887
Kind Code:
A
Abstract:
The metastable atom bombardment source provides a charged particle free beam of metastable species that can be used to bombard and ionize organic and inorganic substances in a gas phase. The metastable atoms are produced by inducing a discharge in a gas (rare gases or small molecules). The discharge is curved between the cathode and anode, with the cathode located in a medium pressure zone and the anode located off-axis in a low pressure zone; A nozzle located between the cathode and the anode provides a collimated beam of metastable atoms of low kinetic energy that is directed at an ion volume containing the substances to be analyzed.
Inventors:
Bertrand, Michelle, Jay
Forever, Dennis
Peraldi, Olivier
Leryu, Andre
Forever, Dennis
Peraldi, Olivier
Leryu, Andre
Application Number:
JP2000552705A
Publication Date:
June 18, 2002
Filing Date:
June 01, 1999
Export Citation:
Assignee:
Universite de Montreal
International Classes:
H01J49/04; H01J49/16; H01J49/14; (IPC1-7): H01J49/14; H01J49/04
Domestic Patent References:
| JPH06310091A | 1994-11-04 | |||
| JPH11133000A | 1999-05-21 | |||
| JPS5935347A | 1984-02-27 | |||
| JPH06310091A | 1994-11-04 | |||
| JPH11133000A | 1999-05-21 | |||
| JPS5935347A | 1984-02-27 |
Foreign References:
| WO1995018966A1 | ||||
| WO1995018966A2 | 1995-07-13 |
Other References:
JPN6009002692, Ｋ．Ｒ．Ｈｅｓｓ, "”Ｔｈｅ Ｒｏｌｅ ｏｆ Ｍｅｔａｓｔａｂｌｅ Ａｔｏｍｓ ｉｎ Ｇｌｏｗ Ｄｉｓｃｈａｒｇｅ Ｉｏｎｉｚａｔｉｏｎ Ｐｒｏｃｅｓｓ”", Ａｎａｌｙｔｉｃａｌ Ｃｈｅｍｉｓｔｒｙ, 1988, ｖｏｌ．６０, ｐ．６９１−６９６
Attorney, Agent or Firm:
Minoru Yoshida (2 outside)