Title:
【発明の名称】光検出器およびその製造方法
Document Type and Number:
Japanese Patent JP2002520798
Kind Code:
A
Abstract:
A photosensor comprises a cathode portion (111) sensitive to radiation and/or particles, an anode portion (114) receiving electrons, an evacuated channel (112, 113, 200) having the cathode portion attached to its one end portion in a vacuum-tight manner and the anode portion attached to its other end portion in a vacuum-tight manner, a conductive or semiconductive layer (107) at least partially covering the inner surface of the evacuated channel, wherein the channel is formed of a tubular member (106). A method of manufacturing a channel electron multiplier comprises the steps of forming a tubular member and a conductive or semiconductive layer at least on parts of its inner surface, forming an anode portion and sealing it to the tubular member, evacuating the tubular member, forming a cathode portion sensitive to radiation and/or particles, and sealing the cathode portion to the evacuated tubular member. The detector may at least partially be packed into a casting compound.
Inventors:
Baden, Raimund
Simonetti, John Jr.
Simonetti, John Jr.
Application Number:
JP2000560600A
Publication Date:
July 09, 2002
Filing Date:
June 25, 1999
Export Citation:
Assignee:
Perkin Elmer Optoelectronics Gezel Shaft Mitt Beschlenktel Haftung
International Classes:
H01J43/04; H01J43/24; H01J43/28; (IPC1-7): H01J43/28; H01J43/04; H01J43/24
Domestic Patent References:
| JPH05509192A | 1993-12-16 | |||
| JPH01239749A | 1989-09-25 | |||
| JPH01292737A | 1989-11-27 | |||
| JPS6484560A | 1989-03-29 | |||
| JPH04359855A | 1992-12-14 |
Attorney, Agent or Firm:
Iwao Yamaguchi