Title:
【発明の名称】半導体結晶成長処理のテーパー成長を制御する方法及びシステム
Document Type and Number:
Japanese Patent JP2002541047
Kind Code:
A
Abstract:
A method and system for controlling growth of a taper portion of a semiconductor single crystal based on the slope of the taper. A crystal drive unit pulls the growing crystal from a melt at a target pull rate that substantially follows an initial velocity profile for growing the taper. A controller calculates a taper slope measurement as a function of a change in crystal diameter relative to a change in crystal length. The controller then generates an error signal as a function of the difference between the taper slope measurement and a target taper slope and provides a pull rate correction to the crystal drive unit as a function of the error signal. In turn, the crystal drive unit adjusts the pull rate according to the pull rate correction to reduce the difference between the taper slope measurement and the target taper slope. The target taper slope is defined by a function having a generally exponential component and a generally linear component.
Inventors:
Steven El Kimbell
Robert Earl Wyand the Third
Robert Earl Wyand the Third
Application Number:
JP2000609631A
Publication Date:
December 03, 2002
Filing Date:
March 15, 2000
Export Citation:
Assignee:
MEMC ELECTRONIC MATERIALS,INCORPORATED
International Classes:
C30B15/20; C30B15/22; C30B29/06; (IPC1-7): C30B15/20; C30B29/06
Attorney, Agent or Firm:
Aoyama Ryo (1 person outside)