Title:
【発明の名称】可変角度照光ウェーハ検査システム
Document Type and Number:
Japanese Patent JP2003507707
Kind Code:
A
Abstract:
A variable illumination angle inspection system is provided, including a light source providing a light beam and a scanner imparting scanning deflection to the light beam to provide a scanning beam approaching a substrate at a first angle. A deflection element is selectively insertable into an optical path of the scanning beam to deflect the scanning beam so as to cause the scanning beam to approach the substrate at a second angle.
Inventors:
Girad, Armor
Masaki, Harder
Philip, Vi, Howard
Rain Horn, Silviu
Gorberg, Boris
Sam, Daniel, Ai.
Masaki, Harder
Philip, Vi, Howard
Rain Horn, Silviu
Gorberg, Boris
Sam, Daniel, Ai.
Application Number:
JP2001517149A
Publication Date:
February 25, 2003
Filing Date:
August 16, 2000
Export Citation:
Assignee:
APPLIED MATERIALS,INCORPORATED
International Classes:
G01N21/956; G01N21/21; G01N21/95; G02B21/08; G02B26/10; H01L21/66; (IPC1-7): G01N21/956; H01L21/66
Domestic Patent References:
| JPH01193632A | 1989-08-03 | |||
| JPH04339245A | 1992-11-26 | |||
| JP2001516874A | 2001-10-02 | |||
| JPH04307359A | 1992-10-29 | |||
| JPS6182147A | 1986-04-25 | |||
| JPH06160288A | 1994-06-07 |
Foreign References:
| WO1999014575A1 | 1999-03-25 |
Attorney, Agent or Firm:
Yoshiki Hasegawa (2 outside)