Title:
【発明の名称】選ばれた高サーマルノボラックおよびポジ型放射線感受性組成物
Document Type and Number:
Japanese Patent JP2003517489
Kind Code:
A
Abstract:
A high thermal alkali-soluble novolak binder resin, comprising the addition-condensation reaction product of a phenolic mixture with at least one aldehyde source, the feedstock of the phenolic mixture for the reaction comprising: (1) about 25 to about 40 weight percent of the phenolic mixture being a monomer selected from meta-cresol 2,5-xylenol or the combination thereof; (2) about 50 to about 70 weight percent of the phenolic mixture being para-cresol; and (3) about 3 to about 20 weight percent of the phenolic mixture being acetamidophenol; all percentages based on the weight of total phenol monomer feedstock. The invention is also directed to a positive working photoresist made from the composition.
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Inventors:
Andrew Jay Blakeney
Sanjay Marley
Medhat A Tukey
Joseph Shizenski
Sanjay Marley
Medhat A Tukey
Joseph Shizenski
Application Number:
JP2000532459A
Publication Date:
May 27, 2003
Filing Date:
February 17, 1999
Export Citation:
Assignee:
OLIN MICROELECTRONIC CHEMICALS,INC.
International Classes:
G03F7/023; C08G8/16; C08G12/06; C08G14/06; C08G14/073; (IPC1-7): C08G8/16; G03F7/023
Attorney, Agent or Firm:
Chika Takagi (1 person outside)