Title:
【発明の名称】露光装置に用いるレチクル、その検査および製造方法
Document Type and Number:
Japanese Patent JP2003518269
Kind Code:
A
Abstract:
A method for inspecting a reticle to evaluate the degree of corner rounding of a feature of a test pattern includes placing a reticle having a photomask formed thereon under a microscope. The photomask has a pattern corresponding to features of a semiconductor chip design defined therein. In addition, the photomask further has a test pattern and a crosshair orientation mark defined therein. The test pattern has at least one test corner for evaluating a degree of corner rounding when the test pattern is defined in the photomask. The crosshair orientation mark is defined in the photomask to orient a crosshair of the microscope relative to the test pattern. Once the crosshair of the microscope is aligned with the crosshair orientation mark, the crosshair of the microscope is used to evaluate the degree of rounding of the test corner of the test pattern. A method for inspecting a reticle to determine the pass/fail status of the reticle, a method for making a reticle, and a reticle for use in photolithography also are described.
More Like This:
Inventors:
Thomas, F. McMullen
Application Number:
JP2001547537A
Publication Date:
June 03, 2003
Filing Date:
December 15, 2000
Export Citation:
Assignee:
Konin Krekka Philips Electronics NV
International Classes:
G01N21/88; G01N21/956; G03F1/08; G03F7/20; H01L21/027; (IPC1-7): G03F1/08; G01N21/956; H01L21/027
Attorney, Agent or Firm:
Kenji Yoshitake (4 others)