Title:
【発明の名称】半導体電気メッキ装置の電極およびその応用
Document Type and Number:
Japanese Patent JP2003522288
Kind Code:
A
Inventors:
X, Robert D'Abrieu, Giunia
Brett, Martin Sea
Robert Doubler Burner
Harry The Ray, Gaia
Graham, Lloyd Davryu
Hansen, Kyle M
Hawgen, Chris Kay
Pathwater, Brent
Peace, Stephen El
Radlov, Larry Earl
Ritzsdorf, Thomas El
Turner, The Jeffrey Eye
Brett, Martin Sea
Robert Doubler Burner
Harry The Ray, Gaia
Graham, Lloyd Davryu
Hansen, Kyle M
Hawgen, Chris Kay
Pathwater, Brent
Peace, Stephen El
Radlov, Larry Earl
Ritzsdorf, Thomas El
Turner, The Jeffrey Eye
Application Number:
JP2000539193A
Publication Date:
July 22, 2003
Filing Date:
January 14, 1998
Export Citation:
Assignee:
Semi-Tooth Incorporated
International Classes:
C25D7/12; C25D17/04; H01L21/00; H01L21/677; H01L21/687; (IPC1-7): C25D17/04; C25D7/12
Attorney, Agent or Firm:
Heiyoshi Odashima