Title:
双極式電力供給のための電源ユニット
Document Type and Number:
Japanese Patent JP2004507993
Kind Code:
A
Abstract:
The invention relates to a power supply unit for bipolar power supply of a plasma technology or surface technology system having at least one controllable d.c. power supply (G1, G2), whose positive and negative outputs are connected to the input of at least one bridge circuit of electronic power switches (T1 to T4), said power switches being connected on the input side to at least one control signal conditioning device and on the output side to at least one current detection circuit for the open-/closed-loop control of the power switches, and being connected to the load of the system (A). By means of this invention, current pulses having freely variable amplitudes (Vo+, Vo-) can be generated for the positive and negative current pulses by providing for each bridge circuit (T1 to T4) at least two d.c. power supplies (G1, G2), and the positive output of the two d.c. power supplies is connected in series in each case by two power switches (T1 and T4; T2 and T3) to the negative output of the other power supply (G2, G1), where the output of the bridge circuit for the system in each case has a tap between the power switches of the two series circuits.
Inventors:
Marc Gunther
Application Number:
JP2001577694A
Publication Date:
March 11, 2004
Filing Date:
April 17, 2001
Export Citation:
Assignee:
Merek Gesellschaft Mitt Beschlenktel Haftung
International Classes:
H02M7/5387; (IPC1-7): H02M7/48; H02M7/5387
Attorney, Agent or Firm:
Takeshi Kikuchi
Hirayama Sukou
Keiji Nakano
Hirayama Sukou
Keiji Nakano