Title:
静電対物に調整可能な最終電極を設けたSEM
Document Type and Number:
Japanese Patent JP2004513477
Kind Code:
A
Abstract:
A SEM with an electrostatic objective lens 14, 16 and a detector 6, 8 for through-the-lens detection of secondary electrons (SEs) 24. A suitable collection efficiency of the SEs would require a comparatively high electric field near the surface of the specimen 18, whereas suitable voltage contrast (voltage range of the order of from 1 to 5 V) would require a moderate electric field near the surface of the specimen. In accordance with the invention an adjustable voltage source is provided in order to adjust at will the voltage of the final electrode 16 relative to the specimen, such that the voltage contrast and the collection efficiency can be adjusted to an optimum value in conformity with the measurement requirements.
Inventors:
Crans, Yang M
Den Hardoff, Sandelhe
Crane, Marcelinus Pasème
Den Hardoff, Sandelhe
Crane, Marcelinus Pasème
Application Number:
JP2002540177A
Publication Date:
April 30, 2004
Filing Date:
October 16, 2001
Export Citation:
Assignee:
Faye Campani
International Classes:
H01J37/12; H01J37/28; (IPC1-7): H01J37/12; H01J37/28
Attorney, Agent or Firm:
Tadahiko Ito