Title:
圧電アクチュエータおよびそれを用いたポンプ
Document Type and Number:
Japanese Patent JP2004517240
Kind Code:
A
Abstract:
A method for making a piezoelectric actuator comprises coating at least one of a first surface and a second surface of a piezoelectric element with a polyimide adhesive. The piezoelectric element is then heated to dry the adhesive. Afterwards, the piezoelectric element is inserted between a first metallic layer and a second metallic layer to form an assembly. The assembly is placed in a press. While the assembly is in the press, the polyimide adhesive is cured at a curing temperature which does not depole the piezoelectric element, thereby bonding the piezoelectric element between the first metallic layer and the second metallic layer.
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Inventors:
East Willy Joe
Application Number:
JP2002526587A
Publication Date:
June 10, 2004
Filing Date:
September 14, 2001
Export Citation:
Assignee:
Per Technologies LLC.
International Classes:
F04B9/00; F04B43/04; H01L41/047; H01L41/09; H01L41/24; (IPC1-7): F04B43/04; F04B9/00
Attorney, Agent or Firm:
Eisuke Fujimoto