Title:
波長制御を有する注入シード方式F2レーザ
Document Type and Number:
Japanese Patent JP2004524707
Kind Code:
A
Abstract:
The present invention provides a narrow band laser system having two laser subsystems. The first laser subsystem is configured to provide a very narrow band pulsed output beam which is used to injection seed the second laser subsystem where the narrow band pulsed seed beam is amplified to produce a narrow band pulsed output beam. A pulse power supply is provided which is specially configured to precisely time the discharges in the two laser subsystem so that the discharges are properly synchronized. The laser gas comprises F2 at a partial pressure less than about 1% with a buffer gas comprised of helium or neon or a combination of helium and neon. Control of center wavelength of the output beam is provided by adjusting one or more of the following parameters in the first laser: the total laser gas pressure, the relative concentration of helium or neon, F2 partial pressure, laser gas temperature, discharge voltage and pulse energy.
Inventors:
Sandstrom Richard El
Nes Richard M
Partro William N
Elshoff Alexander Eye
Onkels Ekharddi
Oh Jung Hoon
Nes Richard M
Partro William N
Elshoff Alexander Eye
Onkels Ekharddi
Oh Jung Hoon
Application Number:
JP2002580451A
Publication Date:
August 12, 2004
Filing Date:
March 29, 2002
Export Citation:
Assignee:
Cymer, Inc.
International Classes:
G03F7/20; H01S3/03; H01S3/036; H01S3/038; H01S3/08; H01S3/0943; H01S3/097; H01S3/0971; H01S3/104; H01S3/105; H01S3/137; H01S3/223; H01S3/225; H01S3/23; H01S3/041; H01S3/0975; H01S3/102; H01S3/11; H01S3/13; H01S3/139; H01S3/22; (IPC1-7): H01S3/137; H01S3/036; H01S3/0943; H01S3/104; H01S3/23
Attorney, Agent or Firm:
Sadao Kumakura
Fumiaki Otsuka
Toshio Imajo
Takaki Nishijima
Fumiaki Otsuka
Toshio Imajo
Takaki Nishijima