Title:
ピックオフ共振減衰が大きくなった超小型機械慣性センサ
Document Type and Number:
Japanese Patent JP2005504273
Kind Code:
A
Abstract:
A micromechanical inertial sensor is provided having a reduced pickoff Q, while maintaining a high motor Q. The micromechanical inertial sensor includes a pair of proof masses and aligned pickoff plates. Each pickoff plate is spaced from the respective proof mass by a gap that varies in response to out-of-plane movement of the proof mass. The micromechanical inertial sensor also includes at least one voltage source for providing charge to the pickoff plates. By measuring the movement of charge in each electrical circuit that includes a pickoff plate as the gap between the pickoff plate and the respective proof mass varies, a measurement of the rotation of the micromechanical inertial sensor about an input axis may be obtained. The micromechanical inertial sensor further includes resistive elements disposed in series between the voltage source and each pickoff plate to increase the pickoff resonance damping of the micromechanical inertial sensor.
Inventors:
Pinson, John Sea
Application Number:
JP2003529090A
Publication Date:
February 10, 2005
Filing Date:
September 18, 2002
Export Citation:
Assignee:
Honeywell International Inc.
International Classes:
G01C19/5719; (IPC1-7): G01C19/56; G01P9/04
Attorney, Agent or Firm:
Kazuo Shamoto
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Shigeo Takeuchi
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Shigeo Takeuchi