Title:
走査型計測装置の較正のための方法と装置
Document Type and Number:
Japanese Patent JP2005520279
Kind Code:
A
Abstract:
Methods and apparatus for calibration of a scanned beam system are provided by sampling a calibration specimen containing an array of targets with a spacing between samples that is greater than the spacing between targets in the array and forming an image from the samples to reduce calibration specimen degradation and to magnify calibration errors to enable very fine calibration of the scanned beam system.
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Inventors:
Henri J. Reze
Christopher Earl Musil
Christopher Earl Musil
Application Number:
JP2003511269A
Publication Date:
July 07, 2005
Filing Date:
June 28, 2002
Export Citation:
Assignee:
F-I-I Company
International Classes:
G01N23/225; H01J37/147; H01J37/21; (IPC1-7): H01J37/21; G01N23/225; H01J37/147
Attorney, Agent or Firm:
Masahiko Amagai